Laser direct writing of Ga2O3/liquid metal-based flexible humidity sensors

IF 15.3 1区物理与天体物理 Q1 OPTICS

Opto-Electronic Advances Pub Date : 2023-01-01 DOI:10.29026/oea.2023.220172

Songya Cui, Yuyao Lu, Depeng Kong, H. Luo, Liang Peng, Geng Yang, Huayong Yang, Kaichen Xu

引用次数: 10

Abstract

Flexible and wearable humidity sensors play a vital role in daily point-of-care diagnosis and noncontact human-machine interactions. However, achieving a facile and high-speed fabrication approach to realizing flexible humidity sensors remains a challenge. In this work, a wearable capacitive-type Ga 2 O 3 /liquid metal-based humidity sensor is demonstrated by a one-step laser direct writing technique. Owing to the photothermal effect of laser, the Ga 2 O 3 -wrapped liquid metal particles can be selectively sintered and converted from insulative to conductive traces with a resistivity of 0.19 Ω·cm, while the untreated regions serve as active sensing layers in response to moisture changes. Under 95% relative humidity, the humidity sensor displays a highly stable performance along with rapid response and recover time. Utilizing these superior properties, the Ga 2 O 3 /liquid metal-based humidity sensor is able to monitor human respiration rate, as well as skin moisture of the palm under different physiological states for healthcare monitoring.

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激光直写Ga2O3/液态金属柔性湿度传感器

柔性和可穿戴湿度传感器在日常护理点诊断和非接触式人机交互中发挥着至关重要的作用。然而，实现灵活的湿度传感器的简单和高速制造方法仍然是一个挑战。在这项工作中，通过一步激光直写技术展示了一种可穿戴的电容式ga2o3 /液态金属湿度传感器。在激光的光热作用下，包裹g2o3的液态金属颗粒可以选择性烧结，从绝缘线转变为导电线，电阻率为0.19 Ω·cm，而未处理的区域则作为响应水分变化的主动传感层。在95%相对湿度下，湿度传感器性能稳定，响应速度快，恢复时间短。利用这些优越的性能，ga2o3 /液态金属湿度传感器能够监测人体呼吸速率，以及不同生理状态下手掌的皮肤水分，用于医疗监测。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Opto-Electronic Advances OPTICS-

CiteScore

19.30

自引率

7.10%

发文量

128

期刊介绍： Opto-Electronic Advances (OEA) is a distinguished scientific journal that has made significant strides since its inception in March 2018. Here's a collated summary of its key features and accomplishments: Impact Factor and Ranking: OEA boasts an impressive Impact Factor of 14.1, which positions it within the Q1 quartiles of the Optics category. This high ranking indicates that the journal is among the top 25% of its field in terms of citation impact. Open Access and Peer Review: As an open access journal, OEA ensures that research findings are freely available to the global scientific community, promoting wider dissemination and collaboration. It upholds rigorous academic standards through a peer review process, ensuring the quality and integrity of the published research. Database Indexing: OEA's content is indexed in several prestigious databases, including the Science Citation Index (SCI), Engineering Index (EI), Scopus, Chemical Abstracts (CA), and the Index to Chinese Periodical Articles (ICI). This broad indexing facilitates easy access to the journal's articles by researchers worldwide. Scope and Purpose: OEA is committed to serving as a platform for the exchange of knowledge through the publication of high-quality empirical and theoretical research papers. It covers a wide range of topics within the broad area of optics, photonics, and optoelectronics, catering to researchers, academicians, professionals, practitioners, and students alike.