Deposition of carbonitride titanium coatings by magnetron sputtering and its effect on tribo-mechanical properties

IF 0.8 Q4 METALLURGY & METALLURGICAL ENGINEERING

Kompleksnoe Ispolzovanie Mineralnogo Syra Pub Date : 2022-03-02 DOI:10.31643/2022/6445.19

A. Mamayeva, A. Kenzhegulov, A. Panichkin, B. Kshibekova, N. Bakhytuly

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Abstract

Metal parts in machinery often fail as a result of damage caused by wear and tear, resulting in the loss of functionality of the products. Thin film solid nitride coatings are used to improve the wear resistance and service life of parts and are considered to be effective. The article presents a brief overview of modern literature in the field of obtaining wear resistant coatings of titanium carbonitride by using magnetron sputtering. The review presents a detailed assessment of the scientific results obtained depending on the deposition parameters and the conditions for obtaining coatings. The results of the coefficient of friction, wear rate of the coating and counterbody, nanohardness and adhesion force of coatings obtained by magnetron sputtering and its modifications are shown. The influence of alloying elements on the mechanical and tribological properties of titanium carbonitride coatings is considered. Recent advances in the production of titanium carbonitride coatings with improved wear characteristics are discussed.

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磁控溅射沉积碳氮化钛涂层及其对摩擦力学性能的影响

机械中的金属部件经常由于磨损造成的损坏而失效，从而导致产品功能的丧失。薄膜固体氮化物涂层用于提高零件的耐磨性和使用寿命，被认为是有效的。本文对磁控溅射制备碳氮化钛耐磨涂层的现代文献作了简要综述。本文介绍了根据沉积参数和获得涂层的条件所获得的科学结果的详细评估。给出了磁控溅射及其改性方法对涂层的摩擦系数、磨损率、纳米硬度和附着力的影响。研究了合金元素对碳氮化钛涂层力学性能和摩擦学性能的影响。讨论了提高耐磨性能的碳氮化钛涂层的最新研究进展。

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Kompleksnoe Ispolzovanie Mineralnogo Syra Multiple-

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