Preparation and Soft Magnetic Properties of Pulse-Plated Permalloy Films

Abstract

A method for preparing permalloy films by electrodeposition using a square-wave pulse-mode current was studied, along with the magnetic properties of the resulting films. The influence of three plating parameters (duty cycle ratio, frequency, and dc bias) on the formation of film structures, alloy composition, and magnetic properties was investigated. It was found that films with μ _i ≥4000 (max. 6000) and with zero magnetostriction can be obtained with good reproducibility by pulse-plating at a low duty cycle ratio. The characteristics of permalloy film electrodeposited using a square-wave pulse current are discussed.