Case Study: Design and Construction of the Draper Laboratory Microfabrication Center

Q4 Engineering

Journal of the IEST Pub Date : 2013-03-05 DOI:10.17764/JIET.56.1.T755M81670245652

R. Morrison, L. Racz, D. J. Carter

引用次数: 2

Abstract

For 25 years, Draper Laboratory has been active in the areas of microelectromechanical systems (MEMS) and multichip modules (MCM), using two separate laboratories. When these laboratories were constructed, cleanroom technology was in its mid-life cycle. To meet evolving R&D needs, the cleanroom facilities recently underwent a major renovation as described in this article.

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案例研究:德雷柏实验室微细加工中心的设计与建造

25年来，德雷珀实验室一直活跃在微机电系统(MEMS)和多芯片模块(MCM)领域，使用两个独立的实验室。当这些实验室建成时，洁净室技术正处于其生命周期的中期。为了满足不断发展的研发需求，洁净室设施最近进行了一次重大改造，如本文所述。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of the IEST Engineering-Safety, Risk, Reliability and Quality

CiteScore

0.40

自引率

0.00%

发文量

期刊介绍： The Journal of the IEST is an official publication of the Institute of Environmental Sciences and Technology and is of archival quality and noncommercial in nature. It was established to advance knowledge through technical articles selected by peer review, and has been published for over 50 years as a benefit to IEST members and the technical community at large as as a permanent record of progress in the science and technology of the environmental sciences