Modeling of thin film bulk acoustic wave resonators and ladder-type filter design

Abstract

In this paper, PSPICE is implemented to model and simulate the characteristic of thin film bulk acoustic resonator (FBAR). Both analogy equivalent circuits of Acoustic transmission line and Mason model is proposed and transferred to the PSPICE model by using the controlled-source method. The physical parameters such as piezoelectric materials and its thickness, electrode material, area and its thickness affecting the properties of the FBAS are discussed. Finally, we have implemented the FBAR to design a ladder type filter with a center frequency at 1.1 GHz and bandwidth about 60.9%. The study results in that PSPICE is an effective tool for the FBAR modeling and ladder type filter design.