Production of Nanocrystalline Titanium Nitride Powder by Atmospheric Microwave Plasma Torch in Hydrogen/Nitrogen Gas

IF 3.8 3区材料科学 Q1 MATERIALS SCIENCE, CERAMICS

Journal of the American Ceramic Society Pub Date : 2005-09-02 DOI:10.1111/j.1551-2916.2005.00523.x

Dong Hun Shin, Yong Cheol Hong, Han Sup Uhm

引用次数: 31

Abstract

Nanocrystalline titanium nitride (TiN) particles were directly synthesized in an atmospheric microwave plasma torch, using gas-phase titanium tetrachloride (TiCl₄), with N₂ and H₂ as reactants. The gas-phase TiCl₄ was injected with H₂ gas into the microwave plasma-torch flame generated by N₂ swirl gas, and then the dark blue powders were deposited on the inner wall of the quartz tube. The synthesized powder samples were analyzed by scanning electron microscopy (SEM), SEM-EDX, X-ray diffractometer (XRD), transmission electron microscopy, and FT-Raman. The average crystallite sizes of TiN measured from XRD patterns decreased from 15.5 to 11.6 nm, as the flow rate of H₂ injected into the microwave plasma torch increased from 0.03 to 0.3 liters per minute.

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常压微波等离子体炬在氢气/氮气中制备纳米晶氮化钛粉末

以气相四氯化钛(TiCl4)为原料，以N2和H2为反应物，在常压微波等离子体炬中直接合成了纳米晶氮化钛(TiN)颗粒。将气相TiCl4与H2气体注入N2旋流气体产生的微波等离子体炬火焰中，在石英管内壁上沉积深蓝色粉末。采用扫描电镜(SEM)、SEM- edx、x射线衍射仪(XRD)、透射电镜(tem)和傅里叶变换拉曼光谱(FT-Raman)对合成的粉末样品进行了分析。当H2注入微波等离子体炬的流速从0.03 l / min增加到0.3 l / min时，XRD谱图显示TiN的平均晶粒尺寸从15.5 nm减小到11.6 nm。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of the American Ceramic Society 工程技术-材料科学：硅酸盐

CiteScore

7.50

自引率

7.70%

发文量

590

审稿时长

2.1 months

期刊介绍： The Journal of the American Ceramic Society contains records of original research that provide insight into or describe the science of ceramic and glass materials and composites based on ceramics and glasses. These papers include reports on discovery, characterization, and analysis of new inorganic, non-metallic materials; synthesis methods; phase relationships; processing approaches; microstructure-property relationships; and functionalities. Of great interest are works that support understanding founded on fundamental principles using experimental, theoretical, or computational methods or combinations of those approaches. All the published papers must be of enduring value and relevant to the science of ceramics and glasses or composites based on those materials. Papers on fundamental ceramic and glass science are welcome including those in the following areas: Enabling materials for grand challenges[...] Materials design, selection, synthesis and processing methods[...] Characterization of compositions, structures, defects, and properties along with new methods [...] Mechanisms, Theory, Modeling, and Simulation[...] JACerS accepts submissions of full-length Articles reporting original research, in-depth Feature Articles, Reviews of the state-of-the-art with compelling analysis, and Rapid Communications which are short papers with sufficient novelty or impact to justify swift publication.