Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser

IF 6.7 3区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

International Journal of Optomechatronics Pub Date : 2017-01-02 DOI:10.1080/15599612.2017.1406024

Z. Fang, Ni Yao, Min Wang, Jintian Lin, Jianhao Zhang, Rongbo Wu, L. Qiao, W. Fang, T. Lu, Ya Cheng

引用次数: 10

Abstract

ABSTRACT We demonstrate fabrication of a high-quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-µm diameter disks with a 200-nm gap are fabricated. With our device, an optical quality factor as high as 1.35 × 105 is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.

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利用飞秒激光制备高品质因数铌酸锂双盘

摘要:我们展示了利用飞秒激光辅助离子束铣削制备高质量因数铌酸锂双盘低语廊微腔。利用该方法，制备了两个直径为30µm、间隙为200nm的垂直堆叠圆盘。利用我们的器件，证明了高达1.35 × 105的光学质量因子。我们的方法是可扩展的，可以在单个芯片上制造多个磁盘。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

International Journal of Optomechatronics 工程技术-工程：电子与电气

CiteScore

9.30

自引率

0.00%

发文量

审稿时长

3 months

期刊介绍： International Journal of Optomechatronics publishes the latest results of multidisciplinary research at the crossroads between optics, mechanics, fluidics and electronics. Topics you can submit include, but are not limited to: -Adaptive optics- Optomechanics- Machine vision, tracking and control- Image-based micro-/nano- manipulation- Control engineering for optomechatronics- Optical metrology- Optical sensors and light-based actuators- Optomechatronics for astronomy and space applications- Optical-based inspection and fault diagnosis- Micro-/nano- optomechanical systems (MOEMS)- Optofluidics- Optical assembly and packaging- Optical and vision-based manufacturing, processes, monitoring, and control- Optomechatronics systems in bio- and medical technologies (such as optical coherence tomography (OCT) systems or endoscopes and optical based medical instruments)