Precise Measurement of the Thickness of a Dielectric Layer on a Metal Surface by Use of a Modified Otto Optical Configuration

IF 6.7 3区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

International Journal of Optomechatronics Pub Date : 2015-01-02 DOI:10.1080/15599612.2014.988386

Yoshiki Kaneoka, Kentaro Nishigaki, Y. Mizutani, T. Iwata

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引用次数: 8

Abstract

We propose a modified method for thickness measurement of a dielectric coating layer on metal based on Otto optical configuration (O-configuration). This method enables us to estimate the coating thickness that typically ranges from several tens of nanometers to more than one micrometer with precision less than a few nanometers. The common method to measure the thickness of dielectric coating layer is to utilize the frustrated total-internal reflection. In order to measure the thickness of several tens of nanometers, one can apply the surface-plasmon-resonance (SPR) phenomenon generated by the p-polarized light. For thickness larger than one hundred nanometers, a metal-clad leaky-waveguide (MCLW) mode generated by the p- or the s-polarized light can be employed without significant changes to the optical setup. The numerical and experimental verifications of the modified O-configuration reveals its effectiveness for precise measurement of moderately-thick dielectric coating layer on the metal.

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用改进奥托光学结构精确测量金属表面介电层厚度

提出了一种改进的基于Otto光学结构(O-configuration)的金属介质涂层厚度测量方法。这种方法使我们能够估计涂层厚度，通常范围从几十纳米到超过一微米，精度小于几纳米。测量介质涂层厚度的常用方法是利用抑制全内反射。为了测量几十纳米的厚度，可以利用p偏振光产生的表面等离子体共振(SPR)现象。对于大于100纳米的厚度，可以采用p或s偏振光产生的金属包层泄漏波导(MCLW)模式，而无需对光学装置进行重大更改。数值和实验验证了改进的o型结构对金属中厚介质涂层精确测量的有效性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

International Journal of Optomechatronics 工程技术-工程：电子与电气

CiteScore

9.30

自引率

0.00%

发文量

审稿时长

3 months

期刊介绍： International Journal of Optomechatronics publishes the latest results of multidisciplinary research at the crossroads between optics, mechanics, fluidics and electronics. Topics you can submit include, but are not limited to: -Adaptive optics- Optomechanics- Machine vision, tracking and control- Image-based micro-/nano- manipulation- Control engineering for optomechatronics- Optical metrology- Optical sensors and light-based actuators- Optomechatronics for astronomy and space applications- Optical-based inspection and fault diagnosis- Micro-/nano- optomechanical systems (MOEMS)- Optofluidics- Optical assembly and packaging- Optical and vision-based manufacturing, processes, monitoring, and control- Optomechatronics systems in bio- and medical technologies (such as optical coherence tomography (OCT) systems or endoscopes and optical based medical instruments)