Multi objective design optimization of graphene piezoresistive MEMS pressure sensor using design of experiment

Q3 Mathematics

International Journal for Simulation and Multidisciplinary Design Optimization Pub Date : 2022-01-01 DOI:10.1051/smdo/2022018

Meetu Nag, B. Pratap, Ajay Kumar

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引用次数: 0

Abstract

This paper investigates the effect of diaphragm thickness, dimensions of piezoresistors, doping profile and temperature compatibility on sensitivity and non-linearity of graphene MEMS pressure sensor. Taguchi method is used for maximizing the sensitivity and minimizing the nonlinearity of the designed pressure sensor. L27 orthogonal array is utilized for five input factors with three levels. Output voltage is obtained from simulation in COMSOL for different combinations of the input parameters as per L27 orthogonal array. It was found that diaphragm thickness and length of the sensing element shows maximum contribution in increasing the sensitivity of the pressure sensor. Similarly, interaction of diaphragm thickness with piezoresistors thickness and doping concentration shows a major contribution in reducing the non-linearity of the pressure sensor. Other factors such as operating temperature affects both sensitivity and nonlinearity of the pressure sensor with a very low contributing percentage of 0.40% and 2.16%, respectively. Pareto Analysis of variance (ANOVA) was employed to validate the predicated results of the designed pressure sensor. The result indicated that the optimum design shows a sensitivity of 4.10 mV/psi with very low non linearity of 0.1%.

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基于实验设计的石墨烯压阻式MEMS压力传感器多目标优化设计

研究了薄膜厚度、压敏电阻尺寸、掺杂谱和温度相容性对石墨烯MEMS压力传感器灵敏度和非线性的影响。采用田口法使所设计的压力传感器的灵敏度最大化，非线性最小化。5个输入因子采用L27正交阵列，具有3个电平。根据L27正交阵列的不同输入参数组合，在COMSOL软件中模拟得到输出电压。结果表明，膜片厚度和传感元件长度对压力传感器灵敏度的提高贡献最大。同样，膜片厚度与压敏电阻厚度和掺杂浓度的相互作用对降低压力传感器的非线性有重要贡献。其他因素如工作温度对压力传感器的灵敏度和非线性都有影响，贡献率很低，分别为0.40%和2.16%。采用帕累托方差分析(ANOVA)对所设计压力传感器的预测结果进行验证。结果表明，优化设计的灵敏度为4.10 mV/psi，非线性极低，为0.1%。

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来源期刊

International Journal for Simulation and Multidisciplinary Design Optimization Mathematics-Control and Optimization

CiteScore

2.00

自引率

0.00%

发文量

审稿时长

16 weeks

期刊介绍： The International Journal for Simulation and Multidisciplinary Design Optimization is a peer-reviewed journal covering all aspects related to the simulation and multidisciplinary design optimization. It is devoted to publish original work related to advanced design methodologies, theoretical approaches, contemporary computers and their applications to different fields such as engineering software/hardware developments, science, computing techniques, aerospace, automobile, aeronautic, business, management, manufacturing,... etc. Front-edge research topics related to topology optimization, composite material design, numerical simulation of manufacturing process, advanced optimization algorithms, industrial applications of optimization methods are highly suggested. The scope includes, but is not limited to original research contributions, reviews in the following topics: Parameter identification & Surface Response (all aspects of characterization and modeling of materials and structural behaviors, Artificial Neural Network, Parametric Programming, approximation methods,…etc.) Optimization Strategies (optimization methods that involve heuristic or Mathematics approaches, Control Theory, Linear & Nonlinear Programming, Stochastic Programming, Discrete & Dynamic Programming, Operational Research, Algorithms in Optimization based on nature behaviors,….etc.) Structural Optimization (sizing, shape and topology optimizations with or without external constraints for materials and structures) Dynamic and Vibration (cover modelling and simulation for dynamic and vibration analysis, shape and topology optimizations with or without external constraints for materials and structures) Industrial Applications (Applications Related to Optimization, Modelling for Engineering applications are very welcome. Authors should underline the technological, numerical or integration of the mentioned scopes.).