Design and implementation of anulus-shaped ciliary structure for four-unit MEMS vector hydrophone

Q3 Engineering

International Journal of Metrology and Quality Engineering Pub Date : 2021-01-01 DOI:10.1051/IJMQE/2021002

Xiaoyong Zhang, Nixin Shen, Qingda Xu, Yu Pei, Yuqi Lian, Weidong Wang, Zhang Guojun, Zhang Wendong

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引用次数: 2

Abstract

Inspired from fish bionics, an anulus-shaped ciliary structure for four-unit MEMS vector hydrophone (AFUVH) is proposed in this paper. It replaces the previous bionic cilium-shaped structure and becomes a novel sensing structure in the four-unit MEMS vector hydrophone (FUVH), which realizes the complete simulation of the fish lateral line neuromasts structurally and functionally. It not only improves the sensitivity of FUVH, but also retains a sufficient bandwidth, which improves the overall performance of FUVH for monitoring remote ships noise. Meanwhile, this paper theoretically analyzes the performance of AFUVH for detecting acoustic signals. ANSYS 17.0 simulation is used to derive the parameters of effective structure and optimum dimension structure of annulus-shaped ciliary structure. Finally, the experimental results show that comparing with cilium-structured FUVH, the sensitivity of AFUVH with effective structure is increased by 3.92 dB, and the sensitivity of AFUVH with optimum dimension structure is increased by 5.87 dB, reaching up to −177.53 dB.

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四单元MEMS矢量水听器环状纤毛结构的设计与实现

从鱼类仿生学的角度出发，提出了一种四单元MEMS矢量水听器(AFUVH)的环状纤毛结构。它取代了以前的仿生纤毛状结构，成为四单元MEMS矢量水听器(FUVH)中的一种新型传感结构，在结构和功能上完全模拟了鱼类侧线神经杆。它不仅提高了FUVH的灵敏度，而且保留了足够的带宽，提高了FUVH监测远程船舶噪声的整体性能。同时，从理论上分析了AFUVH探测声信号的性能。利用ANSYS 17.0仿真，推导出环形纤毛结构的有效结构参数和最佳尺寸结构参数。实验结果表明，与纤毛结构的FUVH相比，有效结构的灵敏度提高了3.92 dB，最佳尺寸结构的灵敏度提高了5.87 dB，达到- 177.53 dB。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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