Diffuse interface method for simulation of the chemical vapor deposition of pyrolytic carbon: Aspects of the mathematical formulation

S. Dimitrov, Alexander Ekhlakov, T. Langhoff
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引用次数: 5

Abstract

The present work is inspired by Anderson et al. (Phys. D Nonlinear Phenom. 2000; 135(1¯2):175¯194) and Noll (http://www.math.cmu.edu/wn0g/noll) and falls in the conceptual line of the Ginzburg-Landau class of first-order phase-transition models based on the concept of phase-field parameter. Trying to keep the exposition as much general as possible, we develop below a thermodynamically consistent rationalization of the physical process of (anisotropic) deposition of pyrolytic carbon from a gas phase. The derivation line we follow is well established in the field of the modern continuum physics. From the covariance of the first principle of thermodynamics, the second Newton's law and the Liouville's theorem with respect to the one-dimensional Lie groups of transformations, the balance laws for the temperature, linear momentum and density are formulated. This system of partial differential equations is comprehended further by the constitutive laws for the phase field, the stress, and the heat and entropy fluxes obtained in a form consistent with the Clausius-Duhem understanding of the second law. The result referred to as a local, strongly coupled initial boundary value problem of chemical vapor deposition (IBVP-CVD) constitutes the general mathematical description of the CVD process. The weak form of isotropic IBVP-CVD is then derived and discretized by means of the discontinuous Galerkin method. At the end of the paper, we also derive the weak formulations for the local lifting operators that provide the stabilization mechanism for the discontinuous Galerkin discretization scheme.
模拟热解碳化学气相沉积的扩散界面法:数学公式的几个方面
目前的工作是受到安德森等人的启发。D非线性现象。2000;135(1¯2):175¯194)和Noll (http://www.math.cmu.edu/wn0g/noll),并且属于基于相场参数概念的Ginzburg-Landau类一阶相变模型的概念线。为了尽可能地概括这一现象,我们对气态热解碳(各向异性)沉积的物理过程进行了热力学一致的合理化解释。我们所遵循的推导线在现代连续介质物理学领域中已经确立。从热力学第一原理、牛顿第二定律和刘维尔定理对一维变换李群的协方差出发,导出了温度、线性动量和密度的平衡定律。这个偏微分方程系统进一步被相场、应力、热和熵流的本构定律所理解,其形式与克劳修斯-迪昂对第二定律的理解一致。该结果被称为化学气相沉积(IBVP-CVD)的局部强耦合初边值问题,构成了CVD过程的一般数学描述。然后推导了各向同性IBVP-CVD的弱形式,并用不连续伽辽金方法将其离散化。在本文的最后,我们还导出了局部提升算子的弱表达式,为不连续Galerkin离散方案提供了稳定机制。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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