Towards a fully integrated sub-THz microfluidic sensor platform for dielectric spectroscopy

IF 0.8 4区工程技术 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC

Frequenz Pub Date : 2022-10-10 DOI:10.1515/freq-2022-0091

C. Heine, E. C. Durmaz, Defu Wang, Zhibo Cao, M. Wietstruck, B. Tillack, D. Kissinger

引用次数: 1

Abstract

Abstract Dielectric spectroscopy in the sub-THz regime is a promising candidate for microfluidic-based analysis of biological cells and bio-molecules, since multiple vibrational and rotational transition energy levels exist in this frequency range (P. Siegel, “Terahertz technology in biology and medicine,” IEEE Trans. Microw. Theor. Tech., vol. 52, pp. 2438–2447, 2004). This article presents our recent efforts in the implementation of microfluidic channel networks with silicon-based technologies to unleash the potential of an integrated sub-THz microfluidic sensor platform. Various aspects of dielectric sensors, readout systems, flowmeter design as well as implemention- and technology-related questions are addressed. Three dielectric sensor systems are presented operating at 240 GHz realizing transmission-based, reflection-based and full two-port architectures. Furthermore different silicon based microchannel integration techniques are discussed as well as a novel copper pillar-based PCB microchannel method is proposed and successfully demonstrated.

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迈向一个完全集成的亚太赫兹微流控电介质光谱传感器平台

摘要亚太赫兹区域的介电光谱是基于微流体的生物细胞和生物分子分析的一种很有前途的候选者，因为在这个频率范围内存在多个振动和旋转跃迁能级（P.Siegel，“生物学和医学中的太赫兹技术”，IEEE Trans.Microw.Theor.Tech.，第52卷，第2438–24472004页）。本文介绍了我们最近在利用硅基技术实现微流体通道网络方面所做的努力，以释放集成亚太赫兹微流体传感器平台的潜力。介绍了介质传感器、读出系统、流量计设计以及实现和技术相关问题的各个方面。介绍了三种在240GHz下工作的介质传感器系统，实现了基于传输、基于反射和全双端口结构。此外，还讨论了不同的硅基微通道集成技术，并提出了一种新的基于铜柱的PCB微通道方法，并成功地进行了演示。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Frequenz 工程技术-工程：电子与电气

CiteScore

2.40

自引率

18.20%

发文量

审稿时长

3 months

期刊介绍： Frequenz is one of the leading scientific and technological journals covering all aspects of RF-, Microwave-, and THz-Engineering. It is a peer-reviewed, bi-monthly published journal. Frequenz was first published in 1947 with a circulation of 7000 copies, focusing on telecommunications. Today, the major objective of Frequenz is to highlight current research activities and development efforts in RF-, Microwave-, and THz-Engineering throughout a wide frequency spectrum ranging from radio via microwave up to THz frequencies. RF-, Microwave-, and THz-Engineering is a very active area of Research & Development as well as of Applications in a wide variety of fields. It has been the key to enabling technologies responsible for phenomenal growth of satellite broadcasting, wireless communications, satellite and terrestrial mobile communications and navigation, high-speed THz communication systems. It will open up new technologies in communications, radar, remote sensing and imaging, in identification and localization as well as in sensors, e.g. for wireless industrial process and environmental monitoring as well as for biomedical sensing.