Synthesis and characterization of ferrous manganese tungsten thin films for magnetic MEMS devices

Abstract

Fe-Mn-W thin films were synthesized by electrodeposition technique with different current density and different deposition time. Electrodeposition method is a flexible and less expensive avenue which produces alloys in controlled thickness, shapes and sizes. The hysteresis loops of Fe-Mn-W alloys films were studied by using vibrating sample magnetometer. The crystalline size and surface morphology of the deposited thin films were calculated by using X-ray diffraction (XRD) studies and Scanning Electron Microscope (SEM). Energy Dispersive X-ray Spectroscopy (EDAX) was used to identify the components of the films. Hardness and adhesion of the deposited thin films were investigated by Vickers hardness tester using diamond intender method.