Study of structural and morphological properties of RF-sputtered SnO2 thin films and their effect on gas-sensing phenomenon

IF 0.5 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC

International Journal on Smart Sensing and Intelligent Systems Pub Date : 2023-01-01 DOI:10.2478/ijssis-2023-0003

A. Arora, S. Mahajan, Maya Verma, D. Haridas

{"title":"Study of structural and morphological properties of RF-sputtered SnO2 thin films and their effect on gas-sensing phenomenon","authors":"A. Arora, S. Mahajan, Maya Verma, D. Haridas","doi":"10.2478/ijssis-2023-0003","DOIUrl":null,"url":null,"abstract":"Abstract The present work focuses on understanding the impact of varying the thickness of SnO2 thin films on its gas-sensing response. Systematic studies were conducted by X-ray diffraction (XRD) and atomic force microscopy (AFM) on the structural and morphological properties of SnO2 thin films, which were thereafter correlated for a deeper understanding of the sensing phenomenon. The structural and morphological properties of SnO2 thin films were found to be highly dependent on the film thickness. The 90 nm SnO2 thin film exhibits the maximum sensing response to 200 ppm liquefied petroleum gas (LPG). A rough microstructure and the maximum surface-to-volume ratio of the 90 nm SnO2 thin film favors the gas-sensing response. It also possesses the smallest grain size, with the majority of crystallites oriented along the preferred (110) plane. The results suggest the possibility of utilizing the 90 nm SnO2 thin film as a base material, which can be further modified using a catalyst for the efficient detection of LPG gas in the future.","PeriodicalId":45623,"journal":{"name":"International Journal on Smart Sensing and Intelligent Systems","volume":" ","pages":""},"PeriodicalIF":0.5000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal on Smart Sensing and Intelligent Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2478/ijssis-2023-0003","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}

引用次数: 2

Abstract

Abstract The present work focuses on understanding the impact of varying the thickness of SnO2 thin films on its gas-sensing response. Systematic studies were conducted by X-ray diffraction (XRD) and atomic force microscopy (AFM) on the structural and morphological properties of SnO2 thin films, which were thereafter correlated for a deeper understanding of the sensing phenomenon. The structural and morphological properties of SnO2 thin films were found to be highly dependent on the film thickness. The 90 nm SnO2 thin film exhibits the maximum sensing response to 200 ppm liquefied petroleum gas (LPG). A rough microstructure and the maximum surface-to-volume ratio of the 90 nm SnO2 thin film favors the gas-sensing response. It also possesses the smallest grain size, with the majority of crystallites oriented along the preferred (110) plane. The results suggest the possibility of utilizing the 90 nm SnO2 thin film as a base material, which can be further modified using a catalyst for the efficient detection of LPG gas in the future.

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射频溅射SnO2薄膜的结构和形貌特性及其对气敏现象的影响研究

摘要本工作的重点是了解SnO2薄膜厚度的变化对其气敏响应的影响。通过X射线衍射（XRD）和原子力显微镜（AFM）对SnO2薄膜的结构和形态特性进行了系统的研究，随后将其关联起来，以更深入地理解传感现象。SnO2薄膜的结构和形态特性高度依赖于薄膜厚度。90nm SnO2薄膜对200ppm液化石油气（LPG）表现出最大的传感响应。粗糙的微观结构和90nm SnO2薄膜的最大表面体积比有利于气敏响应。它还具有最小的晶粒尺寸，大多数晶粒沿着优选的（110）平面取向。结果表明，有可能使用90nm的SnO2薄膜作为基材，未来可以使用催化剂对其进行进一步改性，以有效检测LPG气体。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

International Journal on Smart Sensing and Intelligent Systems ENGINEERING, ELECTRICAL & ELECTRONIC-

CiteScore

2.70

自引率

8.30%

发文量

审稿时长

8 weeks

期刊介绍： nternational Journal on Smart Sensing and Intelligent Systems (S2IS) is a rapid and high-quality international forum wherein academics, researchers and practitioners may publish their high-quality, original, and state-of-the-art papers describing theoretical aspects, system architectures, analysis and design techniques, and implementation experiences in intelligent sensing technologies. The journal publishes articles reporting substantive results on a wide range of smart sensing approaches applied to variety of domain problems, including but not limited to: Ambient Intelligence and Smart Environment Analysis, Evaluation, and Test of Smart Sensors Intelligent Management of Sensors Fundamentals of Smart Sensing Principles and Mechanisms Materials and its Applications for Smart Sensors Smart Sensing Applications, Hardware, Software, Systems, and Technologies Smart Sensors in Multidisciplinary Domains and Problems Smart Sensors in Science and Engineering Smart Sensors in Social Science and Humanity