The Method and the Results of the Direct Comparison of the Laser Interferometers Renishaw Xl-80

Abstract

The method of the direct comparison of the laser interferometers and method processing of the interferometry measurement results by the least square method (LSM) is present. The additive part of the measurement error for each pair of the interferometers is evaluated and the multiplicative part of the measurement error for each interferometer is evaluated too by LSM. Uncertainty by A tape by LSM is evaluated for all parameters. Results of the comparison of the three interferometers are presented.