An Improved Through-Only De-Embedding Method for 110-GHz On-Wafer RF Device Characterization

IF 2.9 2区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Microwave and Wireless Components Letters Pub Date : 2022-10-01 DOI:10.1109/LMWC.2022.3173970

Ruitao Wang, Chenguang Li, Yan Wang

引用次数: 0

Abstract

In this letter, an improved through-only de-embedding method up to 110 GHz without additional dummy structure is developed and implemented. The highlight of this method is that the distributed effect of the metal interconnections between the pad and the intrinsic device is elaborately considered instead of simply modeled as a lumped constant circuit, and the optimal length of the transmission line is carefully derived. Based on this, the parasitics are removed by calculating the ABCD matrices. On-wafer RF passive devices, including T-coil and capacitor, are fabricated on 28-nm CMOS technology to verify the accuracy of the proposed method from 10 to 110 GHz. The measurement results after de-embedding by the proposed method are in good agreement with the electromagnetic simulation results of the intrinsic devices, which demonstrates that the proposed method has a better performance than conventional methods.

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一种用于110GHz片上射频器件特性的改进的直通去嵌入方法

在这封信中，开发并实现了一种改进的仅通过去嵌入的方法，该方法高达110GHz，没有额外的伪结构。该方法的亮点在于，它仔细考虑了焊盘和本征器件之间金属互连的分布效应，而不是简单地将其建模为集总常数电路，并仔细推导了传输线的最佳长度。在此基础上，通过计算ABCD矩阵来去除寄生。在28nm CMOS技术上制造了包括T线圈和电容器在内的片上RF无源器件，以验证所提出的方法在10至110GHz范围内的准确性。该方法去嵌入后的测量结果与本征器件的电磁模拟结果吻合良好，表明该方法比传统方法具有更好的性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Microwave and Wireless Components Letters 工程技术-工程：电子与电气

自引率

13.30%

发文量

376

审稿时长

3.0 months

期刊介绍： The IEEE Microwave and Wireless Components Letters (MWCL) publishes four-page papers (3 pages of text + up to 1 page of references) that focus on microwave theory, techniques and applications as they relate to components, devices, circuits, biological effects, and systems involving the generation, modulation, demodulation, control, transmission, and detection of microwave signals. This includes scientific, technical, medical and industrial activities. Microwave theory and techniques relates to electromagnetic waves in the frequency range of a few MHz and a THz; other spectral regions and wave types are included within the scope of the MWCL whenever basic microwave theory and techniques can yield useful results. Generally, this occurs in the theory of wave propagation in structures with dimensions comparable to a wavelength, and in the related techniques for analysis and design.