Modelling and simulation of mid-spatial-frequency error generation in CCOS

IF 1.9 4区物理与天体物理 Q3 OPTICS

Journal of the European Optical Society-Rapid Publications Pub Date : 2018-02-15 DOI:10.1186/s41476-018-0075-y

Bo Zhong, Hongzhong Huang, Xianhua Chen, Wenhui Deng, Jian Wang

{"title":"Modelling and simulation of mid-spatial-frequency error generation in CCOS","authors":"Bo Zhong, Hongzhong Huang, Xianhua Chen, Wenhui Deng, Jian Wang","doi":"10.1186/s41476-018-0075-y","DOIUrl":null,"url":null,"abstract":"The computer-controlled optical surfacing (CCOS) technology, which has advantages of high certainty and high convergence rate for surface error correction, has been widely applied in the manufacture of large-aperture optical elements. However, due to the convolution effect, the mid-spatial-frequency (MSF) errors are difficult to be restrained in CCOS.Consequently, this paper presents a theoretical and experimental investigation on the generation of MSF errors, aiming to reveal its main influencing factors, and figure out the optimized parameters and the controlling strategies for restraining MSF errors. A surface topography simulation model for the generation of MSF errors was established first. Based on which, orthogonal simulation experiments were designed and conducted for the following three parameters, i.e., tool influence function (TIF), path type, and path spacing. Subsequently, the proposed model was verified through the practical polishing experiments.The results demonstrated the influencing degree of the parameters and the optimized combination of parameters, and provided process guidance for restraining MSF errors in CCOS.","PeriodicalId":674,"journal":{"name":"Journal of the European Optical Society-Rapid Publications","volume":"14 1","pages":""},"PeriodicalIF":1.9000,"publicationDate":"2018-02-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1186/s41476-018-0075-y","citationCount":"10","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of the European Optical Society-Rapid Publications","FirstCategoryId":"4","ListUrlMain":"https://link.springer.com/article/10.1186/s41476-018-0075-y","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"OPTICS","Score":null,"Total":0}

引用次数: 10

Abstract

The computer-controlled optical surfacing (CCOS) technology, which has advantages of high certainty and high convergence rate for surface error correction, has been widely applied in the manufacture of large-aperture optical elements. However, due to the convolution effect, the mid-spatial-frequency (MSF) errors are difficult to be restrained in CCOS.

Consequently, this paper presents a theoretical and experimental investigation on the generation of MSF errors, aiming to reveal its main influencing factors, and figure out the optimized parameters and the controlling strategies for restraining MSF errors. A surface topography simulation model for the generation of MSF errors was established first. Based on which, orthogonal simulation experiments were designed and conducted for the following three parameters, i.e., tool influence function (TIF), path type, and path spacing. Subsequently, the proposed model was verified through the practical polishing experiments.

The results demonstrated the influencing degree of the parameters and the optimized combination of parameters, and provided process guidance for restraining MSF errors in CCOS.

Abstract Image

查看原文本刊更多论文

CCOS中空频误差产生的建模与仿真

计算机控制的光学表面加工技术(CCOS)具有表面误差修正精度高、收敛速度快等优点，在大口径光学元件的制造中得到了广泛的应用。然而，由于卷积效应的存在，中空频误差难以抑制。因此，本文对MSF误差的产生进行了理论和实验研究，旨在揭示其主要影响因素，并找出抑制MSF误差的优化参数和控制策略。首先建立了MSF误差产生的表面形貌模拟模型。在此基础上，设计并进行了刀具影响函数(TIF)、路径类型、路径间距三个参数的正交模拟实验。随后，通过实际抛光实验对所提模型进行了验证。结果表明了参数的影响程度和参数的优化组合，为抑制CCOS中的MSF误差提供了工艺指导。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Journal of the European Optical Society-Rapid Publications 物理-光学

CiteScore

2.40

自引率

0.00%

发文量

审稿时长

5 weeks

期刊介绍： Rapid progress in optics and photonics has broadened its application enormously into many branches, including information and communication technology, security, sensing, bio- and medical sciences, healthcare and chemistry. Recent achievements in other sciences have allowed continual discovery of new natural mysteries and formulation of challenging goals for optics that require further development of modern concepts and running fundamental research. The Journal of the European Optical Society – Rapid Publications (JEOS:RP) aims to tackle all of the aforementioned points in the form of prompt, scientific, high-quality communications that report on the latest findings. It presents emerging technologies and outlining strategic goals in optics and photonics. The journal covers both fundamental and applied topics, including but not limited to: Classical and quantum optics Light/matter interaction Optical communication Micro- and nanooptics Nonlinear optical phenomena Optical materials Optical metrology Optical spectroscopy Colour research Nano and metamaterials Modern photonics technology Optical engineering, design and instrumentation Optical applications in bio-physics and medicine Interdisciplinary fields using photonics, such as in energy, climate change and cultural heritage The journal aims to provide readers with recent and important achievements in optics/photonics and, as its name suggests, it strives for the shortest possible publication time.