MEMS gratings and their applications

IF 6.7 3区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

International Journal of Optomechatronics Pub Date : 2021-01-01 DOI:10.1080/15599612.2021.1892248

Guangcan Zhou, Zi Heng Lim, Y. Qi, F. Chau, Guangya Zhou

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引用次数: 14

Abstract

Abstract Grating plays an essential role in various optical systems owing to its unique dispersion properties. In recent years, there is increasing demand to miniaturize optical systems for a wide range of field applications. Therefore, the integration of diffraction grating with MEMS technology provides an efficient way to build truly miniaturized optical systems. Till now, MEMS diffraction gratings have mainly been explored in two directions, namely MEMS scanning gratings and MEMS tunable gratings. MEMS scanning gratings are constructed with a variety of MEMS actuators to drive a grating platform to scan across the target, and they play a significant role in various scanning systems. Meanwhile, the dispersive properties of grating scanners make them attractive in wavelength sensing applications, including spectrometers and hyperspectral imaging systems. Tunable gratings typically employ MEMS actuators to dynamically change the diffraction properties, thus tuning its wavelength sensitivity for a specific application. Thus, this review will introduce these two types of MEMS gratings in detail and evaluate their efficiency and advantages in various fields.

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MEMS光栅及其应用

光栅以其独特的色散特性在各种光学系统中起着至关重要的作用。近年来，人们对光学系统小型化的需求越来越大，以满足广泛的现场应用。因此，将衍射光栅与MEMS技术相结合，为构建真正的微型化光学系统提供了一条有效途径。目前，对微机电系统衍射光栅的研究主要有两个方向，即微机电系统扫描光栅和微机电系统可调谐光栅。MEMS扫描光栅由多种MEMS致动器组成，驱动光栅平台对目标进行扫描，在各种扫描系统中发挥着重要作用。同时，光栅扫描仪的色散特性使其在波长传感应用中具有吸引力，包括光谱仪和高光谱成像系统。可调谐光栅通常采用MEMS致动器来动态改变衍射特性，从而为特定应用调整其波长灵敏度。因此，本文将详细介绍这两种类型的MEMS光栅，并评估它们在各个领域的效率和优势。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

International Journal of Optomechatronics 工程技术-工程：电子与电气

CiteScore

9.30

自引率

0.00%

发文量

审稿时长

3 months

期刊介绍： International Journal of Optomechatronics publishes the latest results of multidisciplinary research at the crossroads between optics, mechanics, fluidics and electronics. Topics you can submit include, but are not limited to: -Adaptive optics- Optomechanics- Machine vision, tracking and control- Image-based micro-/nano- manipulation- Control engineering for optomechatronics- Optical metrology- Optical sensors and light-based actuators- Optomechatronics for astronomy and space applications- Optical-based inspection and fault diagnosis- Micro-/nano- optomechanical systems (MOEMS)- Optofluidics- Optical assembly and packaging- Optical and vision-based manufacturing, processes, monitoring, and control- Optomechatronics systems in bio- and medical technologies (such as optical coherence tomography (OCT) systems or endoscopes and optical based medical instruments)