Capacitive response of nanoporous HMDSO film coated interdigited electrodes towards VOCs molecules

IF 1 4区材料科学 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY

Digest Journal of Nanomaterials and Biostructures Pub Date : 2023-03-01 DOI:10.15251/djnb.2023.181.279

K. Dallah, A. Bellel, O. C. Lezzar, S. Sahli

{"title":"Capacitive response of nanoporous HMDSO film coated interdigited electrodes towards VOCs molecules","authors":"K. Dallah, A. Bellel, O. C. Lezzar, S. Sahli","doi":"10.15251/djnb.2023.181.279","DOIUrl":null,"url":null,"abstract":"In this paper, nano-porous thin films capacitive-type sensors have been fabricated for the detection of volatile organic compounds (VOCs) using the micro sized interdigitated electrodes (IDEs). The sensitive layers were elaborated from hexamethyldisiloxane (HMDSO) using plasma enhanced chemical vapor deposition (PECVD) technique. The choice of HMDSO polymer as sensitive layer is based on its low dielectric constant compared to analytes ones. The sensing performances of plasma polymers were strongly correlated to their chemical and physical properties, which depend directly on the plasma polymerization conditions including monomer pressure. The sensor sensitivity was at its highest value of 0.32, 0.24 and 0.20 pF/ppm towards methanol, ethanol and acetone, respectively, for the device fabricated with the smallest gap (36 µm) and higher monomer pressure (50 Pa). Chemical and morphological structures of the elaborated thin sensitive layers have been investigated by Fourier transform infrared spectroscopy (FTIR) and atomic force microscopy (AFM) and scanning electron microscope (SEM), respectively.","PeriodicalId":11233,"journal":{"name":"Digest Journal of Nanomaterials and Biostructures","volume":" ","pages":""},"PeriodicalIF":1.0000,"publicationDate":"2023-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digest Journal of Nanomaterials and Biostructures","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.15251/djnb.2023.181.279","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}

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Abstract

In this paper, nano-porous thin films capacitive-type sensors have been fabricated for the detection of volatile organic compounds (VOCs) using the micro sized interdigitated electrodes (IDEs). The sensitive layers were elaborated from hexamethyldisiloxane (HMDSO) using plasma enhanced chemical vapor deposition (PECVD) technique. The choice of HMDSO polymer as sensitive layer is based on its low dielectric constant compared to analytes ones. The sensing performances of plasma polymers were strongly correlated to their chemical and physical properties, which depend directly on the plasma polymerization conditions including monomer pressure. The sensor sensitivity was at its highest value of 0.32, 0.24 and 0.20 pF/ppm towards methanol, ethanol and acetone, respectively, for the device fabricated with the smallest gap (36 µm) and higher monomer pressure (50 Pa). Chemical and morphological structures of the elaborated thin sensitive layers have been investigated by Fourier transform infrared spectroscopy (FTIR) and atomic force microscopy (AFM) and scanning electron microscope (SEM), respectively.

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纳米多孔HMDSO膜涂覆的交叉电极对VOCs分子的电容性响应

本文利用微型叉指电极（IDE）制备了用于检测挥发性有机化合物（VOC）的纳米多孔薄膜电容型传感器。采用等离子体增强化学气相沉积（PECVD）技术，以六甲基二硅氧烷（HMDSO）为原料制备了敏感层。选择HMDSO聚合物作为敏感层是基于其与分析物相比的低介电常数。等离子体聚合物的传感性能与其化学和物理性质密切相关，而化学和物理性能直接取决于等离子体聚合条件，包括单体压力。对于用最小间隙（36µm）和更高单体压力（50 Pa）制造的器件，传感器对甲醇、乙醇和丙酮的灵敏度分别为0.32、0.24和0.20 pF/ppm的最高值。分别通过傅里叶变换红外光谱（FTIR）、原子力显微镜（AFM）和扫描电子显微镜（SEM）研究了所制备的薄敏感层的化学结构和形态结构。

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