67‐4: Uniform Polycrystalline Si Films Obtained via the Fiber‐laser‐based Spot‐Beam‐Annealing Method

Abstract

Experimental findings are presented on the polycrystalline Si films produced using fiber‐laser‐based Spot‐Beam Annealing (SBA) method. Quantitative analysis was performed based on the results obtained from TEM and other microstructure characterization tools. Comparison is made to the films generated using a state‐of‐the‐art manufacturing ELA system under optimal processing conditions.