Overview of the technologies used in the fabrication of MEMS/NEMS actuators for space applications

Q2 Engineering

INCAS Bulletin Pub Date : 2023-09-04 DOI:10.13111/2066-8201.2023.15.3.5

Ș. Mustață, Cristian Vidan, C. Larco, Carmen-Ioana Bogliș, Bianca-Gabriela Antofie

引用次数: 0

Abstract

Given the advantages in terms of weight, size and cost and because it can withstand severe shocks and temperature changes, the MEMS/NEMS sensors are widely used in the aerospace domain. This paper presents a brief history of the scientists who made reference to micro and nano technologies for the first time, followed by a synthesis of the leading technologies used in the manufacture of microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) intensively used in aerospace industry. After reviewing the latest technologies used in the manufacture of MEMS/NEMS sensors, the paper continues with predicting the current state regarding the development of NEMS and MEMS, respectively.

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用于空间应用的MEMS/NEMS致动器制造技术概述

考虑到重量、尺寸和成本方面的优势，并且由于它可以承受严重的冲击和温度变化，微机电系统/NEMS传感器被广泛应用于航空航天领域。本文简要介绍了首次提及微纳技术的科学家的历史，然后综合了航空航天工业中密集使用的微机电系统（MEMS）和纳米机电系统（NEMS）制造中使用的领先技术。在回顾了MEMS/NEMS传感器制造中使用的最新技术后，本文分别预测了NEMS和MEMS的发展现状。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

INCAS Bulletin Engineering-Aerospace Engineering

自引率

0.00%

发文量

审稿时长

8 weeks

期刊介绍： INCAS BULLETIN is a scientific quartely journal published by INCAS – National Institute for Aerospace Research “Elie Carafoli” (under the aegis of The Romanian Academy) Its current focus is the aerospace field, covering fluid mechanics, aerodynamics, flight theory, aeroelasticity, structures, applied control, mechatronics, experimental aerodynamics, computational methods. All submitted papers are peer-reviewed. The journal will publish reports and short research original papers of substance. Unique features distinguishing this journal: R & D reports in aerospace sciences in Romania The INCAS BULLETIN of the National Institute for Aerospace Research "Elie Carafoli" includes the following sections: 1) FULL PAPERS. -Strength of materials, elasticity, plasticity, aeroelasticity, static and dynamic analysis of structures, vibrations and impact. -Systems, mechatronics and control in aerospace. -Materials and tribology. -Kinematics and dynamics of mechanisms, friction, lubrication. -Measurement technique. -Aeroacoustics, ventilation, wind motors. -Management in Aerospace Activities. 2) TECHNICAL-SCIENTIFIC NOTES and REPORTS. Includes: case studies, technical-scientific notes and reports on published areas. 3) INCAS NEWS. Promote and emphasise INCAS technical base and achievements. 4) BOOK REVIEWS.