{"title":"Environmental temperature effect on dimensional measurements of atomic force microscopy","authors":"Chengfu Ma, Yuhang Chen, Wenhao Huang","doi":"10.1063/10.0003939","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":35428,"journal":{"name":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","volume":"4 1","pages":"023003"},"PeriodicalIF":3.5000,"publicationDate":"2021-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1063/10.0003939","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.1063/10.0003939","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 1