Self-Adaptive Grinding for Blind Tip Reconstruction of AFM Diamond Probe

Linyan Xu 1, Qishan Guo 2, Shuangbei Qian, Sen Wu
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引用次数: 4

Abstract

Blind tip reconstruction (BTR) method is one of the favorable methods to estimate the atomic force microscopy (AFM) probe shape. The exact shape of the characterizer is not required for BTR, while the geometry of the sample may affect the reconstruction significantly. A cone-shaped array sample was chosen as a characterizer to be evaluated. The target AFM probe to be reconstructed was a diamond triangular pyramid probe with two feature angles, namely front angle (FA) and back angle (BA). Four conical structures with different semi-angles were dilated by the pyramid probe. Simulation of scanning process demonstrates that it is easy to judge from the images of the isolated rotary structure, cone-shaped, the suitability of the sample to be a tip characterizer for a pyramid probe. The cone-shaped array sample was repeatedly scanned 50 times by the diamond probe using an AFM. The series of scanning images shrank gradually and more information of the probe was exhibited in the images, indicating that the characterizer has been more suitable for BTR. The feature angle FA of the characterizer increasingly reduces during the scanning process. A self-adaptive grinding between the probe and the characterizer contributes to BTR of the diamond pyramid probe.

AFM金刚石探针盲尖重建的自适应磨削
盲尖端重建(BTR)方法是估计原子力显微镜(AFM)探针形状的一种较好的方法。表征器的确切形状不需要BTR,而样品的几何形状可能会显著影响重建。选取一个锥形阵列样品作为表征物进行评价。重建的目标AFM探针为具有前角(FA)和后角(BA)两个特征角的菱形三角金字塔探针。用金字塔探针对四个不同半角的锥形结构进行了扩张。扫描过程的仿真结果表明,从孤立的圆锥形旋转结构的图像中可以很容易地判断样品是否适合作为金字塔探针的尖端表征物。利用原子力显微镜,金刚石探针对锥形阵列样品进行了50次重复扫描。扫描图像序列逐渐缩小,显示出更多的探针信息,表明该表征剂更适合于BTR。在扫描过程中,表征器的特征角FA逐渐减小。探针与表征器之间的自适应磨削有助于金刚石金字塔探针的BTR。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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