Synthetic wavelength scanning interferometry for 3D surface profilometry with extended range of height measurement using multi-colour LED light sources

IF 1.2 4区 物理与天体物理 Q4 OPTICS
Priyanka Mann, Vishesh K. Dubey, Azeem Ahmad, Ankit Butola, D. Mehta
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引用次数: 0

Abstract

We report three-dimensional surface profilometry with extended range of height measurements using synthetic wavelength scanning interferometry without tunable filters, wavelength-tuning lasers, grating elements. We have used inexpensive multiple colour light emitting diodes (LEDs) and operate them sequentially one by one or combination of two or more colours simultaneously to visualize synthetic wavelength light source. Multiple colour LED light source was synthesized and entire visible range from violet to deep red colour was covered. A wide range of synthetic wavelengths were obtained. Five step phase shifting algorithm was used to recover phase maps with Mirau type interferometer which can be further utilized for 3D height measurements. A simple phase subtraction method was used to reconstruct the phase map at synthetic wavelength. The present system provides extended range of height measurements from sub-wavelength to tens of wavelengths. Experimental results of 3D-surface profile measurements of Si-IC chip and standard step object are presented.
合成波长扫描干涉法三维表面轮廓测量与扩展范围的高度测量使用多色LED光源
我们报告三维表面轮廓测量与扩展范围的高度测量使用合成波长扫描干涉测量无可调滤波器,波长调谐激光器,光栅元件。我们已经使用廉价的多色发光二极管(led),并按顺序一个接一个或两种或多种颜色的组合同时操作,以可视化合成波长光源。合成了多色LED光源,覆盖了从紫色到深红色的整个可见范围。合成波长的范围很广。采用五步移相算法恢复Mirau型干涉仪的相位图,可进一步用于三维高度测量。采用一种简单的相位减法重建合成波长的相位图。目前的系统提供了扩展的高度测量范围,从亚波长到几十个波长。给出了硅集成电路芯片和标准台阶物体三维表面轮廓测量的实验结果。
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来源期刊
Journal of Modern Optics
Journal of Modern Optics 物理-光学
CiteScore
2.90
自引率
0.00%
发文量
90
审稿时长
2.6 months
期刊介绍: The journal (under its former title Optica Acta) was founded in 1953 - some years before the advent of the laser - as an international journal of optics. Since then optical research has changed greatly; fresh areas of inquiry have been explored, different techniques have been employed and the range of application has greatly increased. The journal has continued to reflect these advances as part of its steadily widening scope. Journal of Modern Optics aims to publish original and timely contributions to optical knowledge from educational institutions, government establishments and industrial R&D groups world-wide. The whole field of classical and quantum optics is covered. Papers may deal with the applications of fundamentals of modern optics, considering both experimental and theoretical aspects of contemporary research. In addition to regular papers, there are topical and tutorial reviews, and special issues on highlighted areas. All manuscript submissions are subject to initial appraisal by the Editor, and, if found suitable for further consideration, to peer review by independent, anonymous expert referees. General topics covered include: • Optical and photonic materials (inc. metamaterials) • Plasmonics and nanophotonics • Quantum optics (inc. quantum information) • Optical instrumentation and technology (inc. detectors, metrology, sensors, lasers) • Coherence, propagation, polarization and manipulation (classical optics) • Scattering and holography (diffractive optics) • Optical fibres and optical communications (inc. integrated optics, amplifiers) • Vision science and applications • Medical and biomedical optics • Nonlinear and ultrafast optics (inc. harmonic generation, multiphoton spectroscopy) • Imaging and Image processing
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