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Reactive Molecular Dynamic Simulations of Hydrogenation Process of Amorphous Silicon Nitride

IF 1.4 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY
International Journal of Computational Materials Science and Engineering Pub Date : 2022-04-18 DOI:10.1142/s2047684122500087
M. A. Pamungkas, Anisa Widyaningrum, Istiroyah
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非晶氮化硅加氢过程的反应分子动力学模拟
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来源期刊
International Journal of Computational Materials Science and Engineering
International Journal of Computational Materials Science and Engineering MATERIALS SCIENCE, MULTIDISCIPLINARY-
CiteScore
2.10
自引率
15.40%
发文量
27
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