Electrode design for multimode suppression of aluminum nitride tuning fork resonators

IF 3.5 3区工程技术 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering Pub Date : 2023-06-29 DOI:10.1063/10.0019629

Yi Yuan, Qingrui Yang, Haolin Li, Shuai Shi, Pengfei Niu, Chongling Sun, Bohua Liu, Menglun Zhang, W. Pang

引用次数: 0

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氮化铝音叉谐振器多模抑制电极的设计

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering Engineering-Industrial and Manufacturing Engineering

CiteScore

6.50

自引率

0.00%

发文量

1379

审稿时长

14 weeks