Electrostatic field in terms of geometric curvature in membrane MEMS devices

Abstract

Abstract In this paper we present, in a framework of 1D-membrane Micro-Electro-Mechanical- Systems (MEMS) theory, a formalization of the problem of existence and uniqueness of a solution related to the membrane deformation u for electrostatic actuation in the steady- state case. In particular, we propose a new model in which the electric field magnitude E is proportional to the curvature of the membrane and, for it, we obtain results of existence by Schauder-Tychono's fixed point application and subsequently we establish conditions of uniqueness. Finally, some numerical tests have been carried out to further support the analytical results.