Recent development of new inductively coupled thermal plasmas for materials processing

IF 7.7 2区物理与天体物理 Q1 PHYSICS, MULTIDISCIPLINARY

Advances in Physics: X Pub Date : 2021-01-01 DOI:10.1080/23746149.2020.1867637

Yasunori Tanaka

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引用次数: 6

Abstract

ABSTRACT This paper explains recent developments in the field of inductively coupled thermal plasmas (ICTP or ITP) used for materials processing. Inductive coupling technique is important to produce thermal plasma with high gas temperature at high pressures. Conventional cylindrical ICTP was developed originally in the 1960s by T. Reed. It remains widely used for different materials processing today, with almost identical configuration to the original version. Through some revision and improved functionalization, ICTPs of several kinds such as DC–RF hybrid ICTP have also been developed. They are also widely adopted for processing of various materials because of their various benefits. Inductively coupled plasma at low pressures are not treated herein: only thermal plasma with high enthalpy. One is modulated induction thermal plasma (MITP), which has a function of controlling the temperature and chemical active fields in the time domain. Another development in ICTP includes changes in the ICTP configuration such as a planar-ICTP and loop-ICTP. These were developed for large-area materials processing. GRAPHICAL ABSTRACT

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新型材料加工用电感耦合热等离子体研究进展

本文介绍了用于材料加工的电感耦合热等离子体(ICTP或ITP)领域的最新进展。电感耦合技术是在高压条件下产生高气体温度热等离子体的重要技术。传统的圆柱形ICTP最初是在20世纪60年代由T. Reed开发的。今天，它仍然广泛用于不同的材料加工，与原始版本几乎相同的配置。经过一些改进和功能化，还开发了几种类型的ICTP，如DC-RF混合ICTP。由于其各种优点，也被广泛应用于各种材料的加工。这里不处理低压下的电感耦合等离子体，只处理高焓的热等离子体。一种是调制感应热等离子体(MITP)，它具有控制时域温度和化学活性场的功能。ICTP的另一个发展包括对ICTP配置的更改，例如平面ICTP和循环ICTP。这些是为大面积材料加工而开发的。图形抽象

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来源期刊

Advances in Physics: X Physics and Astronomy-General Physics and Astronomy

CiteScore

13.60

自引率

0.00%

发文量

审稿时长

13 weeks

期刊介绍： Advances in Physics: X is a fully open-access journal that promotes the centrality of physics and physical measurement to modern science and technology. Advances in Physics: X aims to demonstrate the interconnectivity of physics, meaning the intellectual relationships that exist between one branch of physics and another, as well as the influence of physics across (hence the “X”) traditional boundaries into other disciplines including: Chemistry Materials Science Engineering Biology Medicine