A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow force measurement

IF 4.7 2区工程技术 Q1 ENGINEERING, MECHANICAL

Frontiers of Mechanical Engineering Pub Date : 2023-06-01 DOI:10.1007/s11465-023-0747-1

Wendi Gao, B. Tian, Cunlang Liu, Yingbiao Mi, Chen Jia, Libo Zhao, Tao Liu, Nan Zhu, Ping Yang, Qijing Lin, Zhuangde Jiang, D. Sun

引用次数: 0

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一种MEMS电容式传感器在超低力测量中机电解耦的仿生方法

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Frontiers of Mechanical Engineering Engineering-Mechanical Engineering

CiteScore

7.20

自引率

6.70%

发文量

731

期刊介绍： Frontiers of Mechanical Engineering is an international peer-reviewed academic journal sponsored by the Ministry of Education of China. The journal seeks to provide a forum for a broad blend of high-quality academic papers in order to promote rapid communication and exchange between researchers, scientists, and engineers in the field of mechanical engineering. The journal publishes original research articles, review articles and feature articles.