State-of-the-art and recent developments in micro/nanoscale pressure sensors for smart wearable devices and health monitoring systems

Ye Chang, Jingjing Zuo, Hainan Zhang, Xuexin Duan
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引用次数: 37

Abstract

Small-sized, low-cost, and high-sensitivity sensors are required for pressure-sensing applications because of their critical role in consumer electronics, automotive applications, and industrial environments. Thus, micro/nanoscale pressure sensors based on micro/nanofabrication and micro/nanoelectromechanical system technologies have emerged as a promising class of pressure sensors on account of their remarkable miniaturization and performance. These sensors have recently been developed to feature multifunctionality and applicability to novel scenarios, such as smart wearable devices and health monitoring systems. In this review, we summarize the major sensing principles used in micro/nanoscale pressure sensors and discuss recent progress in the development of four major categories of these sensors, namely, novel material-based, flexible, implantable, and self-powered pressure sensors.

用于智能穿戴设备和健康监测系统的微/纳米级压力传感器的现状和最新发展
压力传感应用需要小尺寸、低成本和高灵敏度的传感器,因为它们在消费电子、汽车应用和工业环境中起着关键作用。因此,基于微/纳米加工和微/纳米机电系统技术的微/纳米压力传感器以其卓越的小型化和性能成为一种有前景的压力传感器。这些传感器最近被开发成具有多功能和适用于新场景的功能,例如智能可穿戴设备和健康监测系统。本文综述了用于微/纳米压力传感器的主要传感原理,并讨论了新型材料压力传感器、柔性压力传感器、植入式压力传感器和自供电压力传感器这四大类传感器的最新进展。
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