Study on the suitability of ZnO thin film for dynamic pressure sensing application

IF 0.5 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC

International Journal on Smart Sensing and Intelligent Systems Pub Date : 2020-01-01 DOI:10.21307/ijssis-2020-002

Suma M. N., V. Gaddam, M. Prasad, M. Nayak, K. Rajanna

引用次数: 0

Abstract

Abstract ZnO thin films were prepared by RF reactive magnetron sputtering on phynox substrate at room temperature for four different thicknesses by varying deposition duration. The structural and morphological properties and composition of these films were characterized using XRD, SEM, and EDS, respectively. Suitability of these films for dynamic pressure sensing applications and the effect of film thickness on dynamic pressure sensing were evaluated experimentally using a shock tube equipment. Shock tube test results show the pure dynamic behavior of ZnO films with fast rise and discharge. Sensors with higher film thickness showed improved sensitivity which is on par with commercially available dynamic pressure sensors. This work demonstrates that the cost-effective sensors based on ZnO thin film are capable of sensing dynamic pressures for different pressure ranges.

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ZnO薄膜在动态压力传感中的适用性研究

摘要:采用射频反应磁控溅射法制备了四种不同厚度、不同沉积时间的ZnO薄膜。利用XRD、SEM和EDS对膜的结构、形态和组成进行了表征。在激波管实验装置上，对这些薄膜在动态压力传感应用中的适用性以及薄膜厚度对动态压力传感的影响进行了实验评估。激波管试验结果表明，ZnO薄膜具有快速上升和快速放电的纯动态特性。具有较高薄膜厚度的传感器显示出与市售动态压力传感器相当的灵敏度。本工作证明了基于ZnO薄膜的低成本传感器能够在不同压力范围内感知动态压力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

International Journal on Smart Sensing and Intelligent Systems ENGINEERING, ELECTRICAL & ELECTRONIC-

CiteScore

2.70

自引率

8.30%

发文量

审稿时长

8 weeks

期刊介绍： nternational Journal on Smart Sensing and Intelligent Systems (S2IS) is a rapid and high-quality international forum wherein academics, researchers and practitioners may publish their high-quality, original, and state-of-the-art papers describing theoretical aspects, system architectures, analysis and design techniques, and implementation experiences in intelligent sensing technologies. The journal publishes articles reporting substantive results on a wide range of smart sensing approaches applied to variety of domain problems, including but not limited to: Ambient Intelligence and Smart Environment Analysis, Evaluation, and Test of Smart Sensors Intelligent Management of Sensors Fundamentals of Smart Sensing Principles and Mechanisms Materials and its Applications for Smart Sensors Smart Sensing Applications, Hardware, Software, Systems, and Technologies Smart Sensors in Multidisciplinary Domains and Problems Smart Sensors in Science and Engineering Smart Sensors in Social Science and Humanity