Design and simulation of a MEMS-based piezoelectric micropump for bio-medical applications

IF 1.6 4区工程技术 Q3 INSTRUMENTS & INSTRUMENTATION

Sensor Review Pub Date : 2023-08-14 DOI:10.1108/sr-01-2023-0004

Sajjad Habashi Youvalari, Arash Olianezhad, S. Afrang

引用次数: 0

Abstract

Purpose The purpose of this paper is to design and simulate a piezoelectric micropump using microelectromechanical systems technology for drug delivery applications. Design/methodology/approach Two piezoelectric actuators are used to actuate and bend the diaphragms in the proposed structure. In this micropump, the liquid flow is rectified by two silicon check valves. Findings The use of two piezoelectric transducer (PZT) actuators in the parallel mod not only reduces dead volume but also increases stroke volume as well. In addition to increasing the flow rate, this phenomenon enhances the operation of the micropump to have self-priming as smoothly as possible. Originality/value This actuating method results in a 22% increase in flow rate and compression ratio, as well as a 15% reduction in function voltage. The fluid-solid interaction is simulated using COMSOL Multiphysics 5.3a.

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生物医学用mems压电微泵的设计与仿真

目的利用微机电系统技术设计并仿真了一种用于药物输送的压电微泵。设计/方法/方法使用两个压电致动器来驱动和弯曲所提出的结构中的隔膜。在这种微型泵中，液体流动由两个硅止回阀进行整流。在并联模式中使用两个压电换能器(PZT)作动器不仅减少了死区体积，而且增加了行程体积。除了增加流量外，这种现象还增强了微泵的运行，使其尽可能平稳地自吸。独创性/价值这种驱动方法使流量和压缩比增加22%，功能电压降低15%。采用COMSOL Multiphysics 5.3a软件对流固相互作用进行模拟。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Sensor Review 工程技术-仪器仪表

CiteScore

3.40

自引率

6.20%

发文量

审稿时长

3.7 months

期刊介绍： Sensor Review publishes peer reviewed state-of-the-art articles and specially commissioned technology reviews. Each issue of this multidisciplinary journal includes high quality original content covering all aspects of sensors and their applications, and reflecting the most interesting and strategically important research and development activities from around the world. Because of this, readers can stay at the very forefront of high technology sensor developments. Emphasis is placed on detailed independent regular and review articles identifying the full range of sensors currently available for specific applications, as well as highlighting those areas of technology showing great potential for the future. The journal encourages authors to consider the practical and social implications of their articles. All articles undergo a rigorous double-blind peer review process which involves an initial assessment of suitability of an article for the journal followed by sending it to, at least two reviewers in the field if deemed suitable. Sensor Review’s coverage includes, but is not restricted to: Mechanical sensors – position, displacement, proximity, velocity, acceleration, vibration, force, torque, pressure, and flow sensors Electric and magnetic sensors – resistance, inductive, capacitive, piezoelectric, eddy-current, electromagnetic, photoelectric, and thermoelectric sensors Temperature sensors, infrared sensors, humidity sensors Optical, electro-optical and fibre-optic sensors and systems, photonic sensors Biosensors, wearable and implantable sensors and systems, immunosensors Gas and chemical sensors and systems, polymer sensors Acoustic and ultrasonic sensors Haptic sensors and devices Smart and intelligent sensors and systems Nanosensors, NEMS, MEMS, and BioMEMS Quantum sensors Sensor systems: sensor data fusion, signals, processing and interfacing, signal conditioning.