Research Progress of Stress Measurement Technologies for Optical Elements

IF 1.8 4区 物理与天体物理 Q3 OPTICS
Shan Wei, Yajun Pang, Zhen-xu Bai, Yulei Wang, Zhiwei Lu
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引用次数: 1

Abstract

It is of great significance to measure the residual stress distribution accurately for optical elements and evaluate its influence on the performance of optical instruments in optical imaging, aviation remote sensing, semiconductor manufacturing, and other fields. The stress of optical elements can be closely related to birefringence based on photoelasticity. Thus, the method of quantifying birefringence to obtain the stress becomes the main method of stress measurement technologies for optical elements. This paper first introduces the basic principle of stress measurement based on photoelasticity. Then, the research progress of stress measurement technologies based on this principle is reviewed, which can be classified into two methods: polarization method and interference method. Meanwhile, the advantages and disadvantages of various stress measurement technologies are analyzed and compared. Finally, the developing trend of stress measurement technologies for optical elements is summarized and prospected.
光学元件应力测量技术的研究进展
在光学成像、航空遥感、半导体制造等领域,准确测量光学元件的残余应力分布,评估其对光学仪器性能的影响具有重要意义。光学元件的应力可以与基于光弹性的双折射密切相关。因此,量化双折射以获得应力的方法成为光学元件应力测量技术的主要方法。本文首先介绍了光弹性应力测量的基本原理。然后,综述了基于这一原理的应力测量技术的研究进展,可分为极化法和干涉法两种方法。同时,分析比较了各种应力测量技术的优缺点。最后,对光学元件应力测量技术的发展趋势进行了总结和展望。
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来源期刊
International Journal of Optics
International Journal of Optics Physics and Astronomy-Atomic and Molecular Physics, and Optics
CiteScore
3.40
自引率
5.90%
发文量
28
审稿时长
13 weeks
期刊介绍: International Journal of Optics publishes papers on the nature of light, its properties and behaviours, and its interaction with matter. The journal considers both fundamental and highly applied studies, especially those that promise technological solutions for the next generation of systems and devices. As well as original research, International Journal of Optics also publishes focused review articles that examine the state of the art, identify emerging trends, and suggest future directions for developing fields.
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