A Simple Stable Inertial Nanopositioner with Piezoelectric Stacks

Pang Zongqiang, Zhang Yue, Zhou Zeqing, Rong Zhou
{"title":"A Simple Stable Inertial Nanopositioner with Piezoelectric Stacks","authors":"Pang Zongqiang,&nbsp;Zhang Yue,&nbsp;Zhou Zeqing,&nbsp;Rong Zhou","doi":"10.13494/j.npe.20170023","DOIUrl":null,"url":null,"abstract":"<div><p>To build a simple and stable nanopositioner which can reduce the complexity of the scanning probe microscopy (SPM) system, a novel inertial nanopositioner with piezoelectric stacks is present ed. The nanopositioner adopts two piezoelectric stacks and one sawtooth driving signal to achieve movement. The two piezoelectric stacks are set in the adjustable direction, and are then fixed on the base. The insulated rail is fixed between the free sides of the two piezoelectric stacks, and the central shaft is pressed by four SiN balls and one CuBe spring in the insulated rail. By applying one sawtooth wave on the piezoelectric stacks, the insulated rail can drive the central shaft to move a nanometer in distance due to its inertance. Experimental results indicate that the nanopositioner can realize nanometer precision fine-tuning and centimeter range coarse adjustment in any direction. The nanopositioner enjoys high compactness and excellent mechanical stability, so it can be easily implanted into precision optical systems and SPM systems.</p></div>","PeriodicalId":87330,"journal":{"name":"Nanotechnology and Precision Engineering","volume":"1 1","pages":"Pages 23-27"},"PeriodicalIF":0.0000,"publicationDate":"2018-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.13494/j.npe.20170023","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nanotechnology and Precision Engineering","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S2589554018300369","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

Abstract

To build a simple and stable nanopositioner which can reduce the complexity of the scanning probe microscopy (SPM) system, a novel inertial nanopositioner with piezoelectric stacks is present ed. The nanopositioner adopts two piezoelectric stacks and one sawtooth driving signal to achieve movement. The two piezoelectric stacks are set in the adjustable direction, and are then fixed on the base. The insulated rail is fixed between the free sides of the two piezoelectric stacks, and the central shaft is pressed by four SiN balls and one CuBe spring in the insulated rail. By applying one sawtooth wave on the piezoelectric stacks, the insulated rail can drive the central shaft to move a nanometer in distance due to its inertance. Experimental results indicate that the nanopositioner can realize nanometer precision fine-tuning and centimeter range coarse adjustment in any direction. The nanopositioner enjoys high compactness and excellent mechanical stability, so it can be easily implanted into precision optical systems and SPM systems.

一种具有压电堆的简单稳定惯性纳米逆变器
为了构建一种简单稳定、降低扫描探针显微镜(SPM)系统复杂性的惯性纳米位移器,提出了一种新型的压电叠片惯性纳米位移器。该纳米位移器采用两个压电叠片和一个锯齿形驱动信号实现运动。两个压电堆设置在可调方向,然后固定在底座上。绝缘轨固定在两个压电堆的自由侧之间,中间轴由绝缘轨内的四个SiN球和一个CuBe弹簧压紧。通过在压电堆上施加一个锯齿波,绝缘导轨可以利用其惯性驱动中心轴移动一个纳米的距离。实验结果表明,该纳米对位器可以在任意方向上实现纳米级精度微调和厘米级范围的粗调整。该纳米定位器具有高度的紧凑性和优异的机械稳定性,因此可以很容易地植入精密光学系统和SPM系统。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信