THERMOMETRIC MODEL OF DIODE TEMPERATURE SENSOR

P. Yaganov
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Abstract

Pavlov L.M., Yahanov P.O. THERMOMETRIC MODEL OF DIODE TEMPERATURE SENSOR   Background.  Microelectronic technologies make it possible to create structures with high sensitivity to external influences. In semiconductor microelectronics, these are structures of the type of potential barrier at the p-n junction. Silicon diode sensors have high temperature sensitivity in a wide temperature range. Both physical and formal mathematical models of the thermometric characteristic of the diode sensor have been developed. The temperature measurement error of some of these methods was not acceptable for the control of many processes. It is relevant to conduct studies of the temperature properties of the p-n transition in a non-equilibrium state to formalize the new thermometric characteristic of the diode sensor. Objective. The purpose of the work is a model of thermometric characteristics of silicon diode sensors based on the results of measurements of volt-ampere characteristics in the temperature range. Methods. Analysis of methods of calibration of thermometric characteristic of diode sensors by volt-ampere characteristics was carried out, factors affecting temperature measurement accuracy were revealed, regression analysis method for formation of polynomial model of thermometric characteristic was substantiated. Results. As a result of studies of the volt-ampere characteristics of silicon diodes in the temperature range (248... 393) K, it was found that the error in measuring temperature by diode sensors is associated with the dependence of the non-ideality factor of the p-n transition on temperature. The accuracy of the thermometric characteristic is estimated, where this functional dependence is represented as an approximation polynomial. Conclusions.  An alternative model of thermometric characterization of diode temperature sensors by the second degree regression equation is presented. The arguments of the function are the current and voltage of the diode in the direct displacement mode. Current stability in the p-n junction circuit is not assumed. The temperature determination accuracy in the temperature range (248... 393) K is within ± (0.2... 0,256) K. Keywords: diode temperature sensors; volt-ampere characteristic; non-ideality factor; regression; thermometric characteristic model.  
二极管温度传感器的测温模型
李立民,叶汉文。二极管温度传感器的温度测量模型。微电子技术使制造对外部影响具有高灵敏度的结构成为可能。在半导体微电子学中,这些是p-n结的势垒类型的结构。硅二极管传感器在很宽的温度范围内具有很高的温度灵敏度。建立了二极管传感器测温特性的物理模型和形式数学模型。其中一些方法的温度测量误差对许多过程的控制是不能接受的。对非平衡态p-n跃迁的温度特性进行研究,可以形式化二极管传感器的新测温特性。目标。本工作的目的是基于温度范围内伏安特性的测量结果,建立硅二极管传感器的测温特性模型。方法。分析了用伏安特性标定二极管传感器测温特性的方法,揭示了影响测温精度的因素,验证了用回归分析法建立测温特性多项式模型的方法。结果。由于对硅二极管在温度范围(248…393) K,发现用二极管传感器测量温度的误差与p-n跃迁的非理想因子对温度的依赖性有关。对测温特性的精度进行估计,其中这种函数依赖关系表示为近似多项式。结论。提出了一种用二度回归方程表征二极管温度传感器温度特性的替代模型。函数的参数是二极管在直接位移模式下的电流和电压。不假设pn结电路的电流稳定。温度范围(248…393) K在±(0.2…关键词:二极管温度传感器;伏安特性;non-ideality因素;回归;测温特性模型。
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