Vibration Measurements by Self-Mixing Interferometry: An Overview of Configurations and Benchmark Performances

Abstract

Self-mixing interferometry (SMI) is suitable to sense and measure vibrations of amplitudes ranging from picometers to millimeters at frequencies from sub-Hz to MHz’s. As an optical probe, SMI has the advantage of being non-invasive with the ability to measure without any treatment of the target surface and operate from a substantial standoff distance from the target. As an additional advantage, the SMI configuration is much simpler than that of conventional interferometers as it does not require any optical part external to the laser source. After a short introduction to the basics of SMI, we review the development of configurations of SMI instruments for vibration measurements, based on both analog and digital processing, with record performance to cover the range of vibration amplitudes from 0.1 nm to 1 mm, frequencies up to MHz, and stand-off distances up to 100 m. These performances set a benchmark that is unequaled by other approaches reported so far in the literature. The configurations we describe are (i) a simple MEMS-response testing instrument based on fringe counting, (ii) a half-fringe locking vibrometer for mechanical mode analysis and transfer function measurements, with a wide linear response on six decades of amplitude, (iii) a vibrometer with analog switching cancellation for μm-to-mm amplitude of vibrations, and (iv) a long standoff distance vibrometer for testing large structures at distances up to 100 m and with nm sensitivity. Lastly, as the vibrometer will almost invariably operate on untreated, diffusing surfaces, we provide an evaluation of phase-induced speckle pattern errors affecting the SMI measurement.