Thermally induced phase transformation and structural modifications of E-beam evaporated zirconia thin films

IF 1.4 4区材料科学 Q3 CRYSTALLOGRAPHY

Phase Transitions Pub Date : 2022-09-02 DOI:10.1080/01411594.2022.2096451

Ankit Kumar, Pravin Kumar, A. S. Dhaliwal

引用次数: 2

Abstract

ABSTRACT The homogeneous zirconia thin films having a thickness of 250 nm synthesized on silicon substrate using an e-beam deposition technique and annealed in the temperature range of 600–1000°C have been investigated for phase transformations of zirconia. It has been observed from the X-ray diffraction (XRD) pattern and the Raman spectroscopy that phase transformation from cubic phase to monoclinic phase of zirconia occurred in the temperature range 600–800°C, despite the amorphous nature of deposited films. From Rietveld refinement studies, it has been found that crystalline phase in zirconia films annealed at 600°C, is cubic in nature. Further, the morphological studies revealed that the grain size of zirconia increases with an increase in the annealing temperature. It is expected that the present studies on structural and morphological properties of zirconia having an emphasis on its cubic phase stabilization shall help to explore its possibility in device applications.

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电子束蒸发氧化锆薄膜的热致相变及其结构改性

摘要厚度为250的均匀氧化锆薄膜采用电子束沉积技术在硅衬底上合成纳米氧化锆，并在600–1000°C的温度范围内退火，研究了氧化锆的相变。从X射线衍射（XRD）图谱和拉曼光谱观察到，尽管沉积膜具有非晶性质，但在600–800°C的温度范围内，氧化锆发生了从立方相到单斜相的相变。Rietveld精炼研究发现，在600°C下退火的氧化锆薄膜中的结晶相本质上是立方相。此外，形态学研究表明，氧化锆的晶粒尺寸随着退火温度的升高而增大。期望目前对氧化锆的结构和形态性质的研究，重点是其立方相稳定性，将有助于探索其在器件应用中的可能性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Phase Transitions 物理-晶体学

CiteScore

3.00

自引率

6.20%

发文量

审稿时长

1.4 months

期刊介绍： Phase Transitions is the only journal devoted exclusively to this important subject. It provides a focus for papers on most aspects of phase transitions in condensed matter. Although emphasis is placed primarily on experimental work, theoretical papers are welcome if they have some bearing on experimental results. The areas of interest include: -structural phase transitions (ferroelectric, ferroelastic, multiferroic, order-disorder, Jahn-Teller, etc.) under a range of external parameters (temperature, pressure, strain, electric/magnetic fields, etc.) -geophysical phase transitions -metal-insulator phase transitions -superconducting and superfluid transitions -magnetic phase transitions -critical phenomena and physical properties at phase transitions -liquid crystals -technological applications of phase transitions -quantum phase transitions Phase Transitions publishes both research papers and invited articles devoted to special topics. Major review papers are particularly welcome. A further emphasis of the journal is the publication of a selected number of small workshops, which are at the forefront of their field.