Influence of Pressure on the Frequency Spectrum of Micro and Nanoresonators on Hinged Supports

Abstract

Eigenfrequencies of bending oscillations are determined for a resonator with rectangular cross-sections mounted on hinged supports. Consideration is given to the surface effect caused by the interaction between gas pressure and the difference in the areas of the resonator’s convex and concave surfaces. Changes in the frequency spectrum are examined at the presence of both concentrated and uniformly distributed masses attached to the resonator’s surface. The solution of the inverse problem enables the identification of attached masses using changes of eigenfrequencies.