Precise spectrophotometric method for semitransparent metallic thin-film index determination using interference enhancement

IF 1.9 4区物理与天体物理 Q3 OPTICS

Journal of the European Optical Society-Rapid Publications Pub Date : 2021-12-21 DOI:10.1186/s41476-021-00172-9

Riley Shurvinton, Fabien Lemarchand, Antonin Moreau, Julien Lumeau

{"title":"Precise spectrophotometric method for semitransparent metallic thin-film index determination using interference enhancement","authors":"Riley Shurvinton, Fabien Lemarchand, Antonin Moreau, Julien Lumeau","doi":"10.1186/s41476-021-00172-9","DOIUrl":null,"url":null,"abstract":"<div><p>A precise spectrophotometric method to determine the refractive index of a semitransparent metallic thin film is presented. This method relies on interference enhancement of the measured spectra, employing an opaque substrate with a dielectric spacer layer beneath the absorbing layer of interest to create interference fringes.The resulting spectral oscillations of the stack are highly sensitive to the properties of the top absorbing layer, allowing precise determination of the refractive index via fitting. The performance of this method is verified using simulations in comparison to the typical method of depositing the absorbing thin film directly onto a transparent substrate. An experimental demonstration is made for titanium thin films over the visible range (370-835 nm). The refractive index of these films is extracted from experimental data using a combination of the Modified Drude and Forouhi-Bloomer models. This method showed high repeatability and precision, and is verified for Ti films between 6-70 nm thickness.</p></div>","PeriodicalId":674,"journal":{"name":"Journal of the European Optical Society-Rapid Publications","volume":"17 1","pages":""},"PeriodicalIF":1.9000,"publicationDate":"2021-12-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://jeos.springeropen.com/counter/pdf/10.1186/s41476-021-00172-9","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of the European Optical Society-Rapid Publications","FirstCategoryId":"4","ListUrlMain":"https://link.springer.com/article/10.1186/s41476-021-00172-9","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"OPTICS","Score":null,"Total":0}

引用次数: 0

Abstract

A precise spectrophotometric method to determine the refractive index of a semitransparent metallic thin film is presented. This method relies on interference enhancement of the measured spectra, employing an opaque substrate with a dielectric spacer layer beneath the absorbing layer of interest to create interference fringes.The resulting spectral oscillations of the stack are highly sensitive to the properties of the top absorbing layer, allowing precise determination of the refractive index via fitting. The performance of this method is verified using simulations in comparison to the typical method of depositing the absorbing thin film directly onto a transparent substrate. An experimental demonstration is made for titanium thin films over the visible range (370-835 nm). The refractive index of these films is extracted from experimental data using a combination of the Modified Drude and Forouhi-Bloomer models. This method showed high repeatability and precision, and is verified for Ti films between 6-70 nm thickness.

查看原文本刊更多论文

干涉增强法测定半透明金属薄膜折射率的精密分光光度法

本文介绍了一种测定半透明金属薄膜折射率的精确分光光度法。这种方法依赖于对测量光谱的干涉增强，采用不透明基底，在相关吸收层下有一个介电间隔层，以产生干涉条纹。由此产生的叠层光谱振荡对顶层吸收层的特性高度敏感，从而可以通过拟合精确确定折射率。与直接在透明基底上沉积吸收薄膜的典型方法相比，这种方法的性能通过模拟得到了验证。实验演示了可见光范围（370-835 纳米）内的钛薄膜。这些薄膜的折射率是通过结合使用修正德鲁德模型和福鲁希-布鲁默模型从实验数据中提取出来的。这种方法显示出很高的重复性和精确性，并对 6-70 nm 厚度的钛薄膜进行了验证。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Journal of the European Optical Society-Rapid Publications 物理-光学

CiteScore

2.40

自引率

0.00%

发文量

审稿时长

5 weeks

期刊介绍： Rapid progress in optics and photonics has broadened its application enormously into many branches, including information and communication technology, security, sensing, bio- and medical sciences, healthcare and chemistry. Recent achievements in other sciences have allowed continual discovery of new natural mysteries and formulation of challenging goals for optics that require further development of modern concepts and running fundamental research. The Journal of the European Optical Society – Rapid Publications (JEOS:RP) aims to tackle all of the aforementioned points in the form of prompt, scientific, high-quality communications that report on the latest findings. It presents emerging technologies and outlining strategic goals in optics and photonics. The journal covers both fundamental and applied topics, including but not limited to: Classical and quantum optics Light/matter interaction Optical communication Micro- and nanooptics Nonlinear optical phenomena Optical materials Optical metrology Optical spectroscopy Colour research Nano and metamaterials Modern photonics technology Optical engineering, design and instrumentation Optical applications in bio-physics and medicine Interdisciplinary fields using photonics, such as in energy, climate change and cultural heritage The journal aims to provide readers with recent and important achievements in optics/photonics and, as its name suggests, it strives for the shortest possible publication time.