Single microhole per pixel for thin Ge-on-Si complementary metal-oxide semiconductor image sensor with enhanced sensitivity up to 1700 nm

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Accounts of Chemical Research Pub Date : 2023-01-01 DOI:10.1117/1.JNP.17.016012

E. Ponizovskaya-Devine, A. Mayet, Amita Rawat, Ahasan Ahamed, Shih-Yuan Wang, A. Elrefaie, Toshishige Yamada, M. Saif Islam

引用次数: 2

Abstract

Abstract. We present a germanium “Ge-on-Si” CMOS image sensor with backside illumination for the near-infrared (NIR) electromagnetic waves (wavelength range 300 to 1700 nm) detection essential for optical sensor technology. The microholes help to enhance the optical efficiency and extend the range to the 1.7-μm wavelength. We demonstrate an optimization for the width and depth of the microholes for maximal absorption in the NIR. We show a reduction in the crosstalk by employing thin SiO2 deep trench isolation in between the pixels. Finally, we show a 26 to 50% reduction in the device capacitance with the introduction of a microhole. Such CMOS-compatible Ge-on-Si sensors will enable high-density, ultrafast, and efficient NIR imaging.

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单微孔每像素薄锗硅互补金属氧化物半导体图像传感器与增强灵敏度高达1700纳米

摘要我们提出了一种具有背面照明的锗“Ge-on-Si”CMOS图像传感器，用于近红外(NIR)电磁波(波长范围为300至1700 nm)检测，这是光学传感器技术所必需的。微孔有助于提高光效率，并将范围扩展到1.7 μm波长。我们演示了优化微孔的宽度和深度，以获得最大的近红外吸收。我们通过在像素之间采用薄SiO2深沟槽隔离来减少串扰。最后，我们展示了引入微孔后器件电容降低26%至50%。这种cmos兼容的Ge-on-Si传感器将实现高密度、超快和高效的近红外成像。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.