Characterization of a novel microhotplate for application in a silicon-based nanofilm gas sensor

IF 1.3 4区工程技术 Q4 CHEMISTRY, ANALYTICAL

Instrumentation Science & Technology Pub Date : 2022-06-16 DOI:10.1080/10739149.2022.2087186

Zhenyu Yuan, Fan Yang, Yudong Li, Jinhe Zhang, Fanli Meng

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Abstract

Abstract The micro-hotplate is the core component of the silicon-based nano-film gas sensor and directly affects the overall performance. This paper first analyzes the heat dissipation of the micro-hotplate and establishes a heat transfer calculation model. Multiphysics coupling is used to optimize the arrangement of the heating and test electrodes to obtain the best design of the micro-hotplate. Next, silicon-based micro-electro-mechanical system (MEMS) performs micro-hotplate processing and electrical connections according to the parameters optimized by the finite element. Lastly, the temperature coefficient of resistance measurement and infrared microscopic imaging were used to complete the characterization of the hotplate and the verification of the theoretical simulation was completed. The size of the micro-hotplate unit is 500 μm × 500 μm, and the area of the heating film area is 160 μm × 160 μm. The micro-hotplate designed in this paper has low power consumption and may be operated up to 357.5 °C with a power of 28.6 mw. Below the working temperature of 357.5 °C, the resistance of the micro-hotplate has an excellent linear relationship with temperature without warping or fracture. The micro-hotplate is small in size and may allow large-scale sensor array integration.

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一种用于硅基纳米膜气体传感器的新型微热板的表征

微热板是硅基纳米膜气体传感器的核心部件，直接影响其整体性能。本文首先分析了微热板的散热特性，建立了微热板的传热计算模型。利用多物理场耦合对加热电极和测试电极的布置进行优化，得到微热板的最佳设计方案。然后，硅基微机电系统(MEMS)根据有限元优化的参数进行微热板加工和电气连接。最后，利用电阻温度系数测量和红外显微成像对热板进行了表征，并完成了理论仿真的验证。微热板单元尺寸为500 μm × 500 μm，热膜面积为160 μm × 160 μm。本文设计的微热板功耗低，工作温度可达357.5℃，功率为28.6 mw。在工作温度357.5℃以下，微热板的电阻与温度呈良好的线性关系，不发生翘曲或断裂。微型热板体积小，可以允许大规模传感器阵列集成。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Instrumentation Science & Technology 工程技术-分析化学

CiteScore

3.50

自引率

0.00%

发文量

审稿时长

>12 weeks

期刊介绍： Instrumentation Science & Technology is an internationally acclaimed forum for fast publication of critical, peer reviewed manuscripts dealing with innovative instrument design and applications in chemistry, physics biotechnology and environmental science. Particular attention is given to state-of-the-art developments and their rapid communication to the scientific community. Emphasis is on modern instrumental concepts, though not exclusively, including detectors, sensors, data acquisition and processing, instrument control, chromatography, electrochemistry, spectroscopy of all types, electrophoresis, radiometry, relaxation methods, thermal analysis, physical property measurements, surface physics, membrane technology, microcomputer design, chip-based processes, and more. Readership includes everyone who uses instrumental techniques to conduct their research and development. They are chemists (organic, inorganic, physical, analytical, nuclear, quality control) biochemists, biotechnologists, engineers, and physicists in all of the instrumental disciplines mentioned above, in both the laboratory and chemical production environments. The journal is an important resource of instrument design and applications data.