Experimental Investigation of Piezoelectric Micropumps with Single, Series or Parallel Pump Chambers

IF 0.8 4区工程技术 Q4 ACOUSTICS

International Journal of Acoustics and Vibration Pub Date : 2020-09-30 DOI:10.20855/ijav.2020.25.31688

Yanfang Guan, Mingyang Bai, Xiangxin Meng, Yansheng Liu, Fengqian Xu

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引用次数: 2

Abstract

Three types of piezoelectric micropumps following different configurations: single, series, and parallel connection, are developed and investigated. All the micropumps are fabricated by wet etching technology and sealed by high temperature glass bonding. They share the same dimension characteristic of diffuser/nozzle microchannels. Verifying the impact of adding series or parallel connected pump chambers on single chambers, as well as verifying the performance of the flow rate, pressure and piezoelectric transducer vibration of three micropumps have been examined. Through the comparisons between three kinds of micropumps, the results show that the flow rate of the micropumps with parallel connected pump chambers have a higher flow rate than that of micropumps with single and serial connected pump chambers under the same driving conditions. In addition, both the flow rate and pressure with the serial micropump are the lowest. The pressure of the micropump with single pump chamber is larger than other kinds of micropumps at certain driving frequencies. Consequently, increasing the pump chambers cannot always increase the performance of the micropump. This coincides with the theory analysis. Finally, the vibration performance of piezoelectric transducers with three micropumps have been carried out. The parallel transducer has a higher vibration displacement than the other two kinds of micropumps. These results have great potentials for integration into labs with a chip or microfluidic driven systems.

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单、串联或并联泵室压电微泵的实验研究

开发并研究了三种不同结构的压电微泵：单、串联和并联。所有的微泵都是通过湿法刻蚀技术制造的，并通过高温玻璃键合进行密封。它们具有与扩散器/喷嘴微通道相同的尺寸特性。验证了增加串联或并联泵室对单室的影响，以及验证了三个微型泵的流量、压力和压电换能器振动的性能。通过对三种微型泵的比较，结果表明，在相同的驱动条件下，具有并联泵室的微型泵的流量高于具有单泵室和串联泵室的小型泵的流量。此外，串联微型泵的流量和压力都是最低的。在一定的驱动频率下，单泵室微型泵的压力比其他类型的微型泵大。因此，增加泵室不能总是提高微型泵的性能。这与理论分析不谋而合。最后，对三个微泵压电换能器的振动性能进行了测试。并联换能器具有比其他两种微泵更高的振动位移。这些结果在集成到具有芯片或微流体驱动系统的实验室中具有巨大潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

International Journal of Acoustics and Vibration ACOUSTICS-ENGINEERING, MECHANICAL

CiteScore

1.60

自引率

10.00%

发文量

审稿时长

12 months

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