The Effect of Annealing Temperature and Reactive Gases on Optical Properties of Cu2O Thin Films

R. Bunea, A. Saikumar, K. Sundaram
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引用次数: 1

Abstract

The Cu2O thin films were synthesized by using RF sputtering technique. Comparisons were made with films created by deposition at room temperature followed by thermal annealing between 100°C and 400°C and using different gases, oxygen (O2) (oxidizing and reactive gas) and nitrogen (N2) (inert gas), besides air. The thickness of the thin films was kept constant, around 2000 A (Angstrom). In addition, the RF power and pressure deposition were kept constant, as well. The thin films were evaluated for a range of wavelengths between 200 nm and 400 nm (Ultra Violet spectrum), 400 nm and 700 nm (Visible spectrum), 700 nm and 800 nm (Infrared spectrum) for both, optical transmittance and photoluminescence. From the experimental results, the higher annealing temperature and the introduction of nitrogen (N2) gas produced the following results: the optical bandgap for the Cu2O was found to be 2.23 eV and photoluminescence peaks were around 551 nm and 555 nm, which matched the theoretical analyses. Overall, there was a decrease in the optical bandgap of the Cu2O from 2.56 eV at room temperature to 2.23 eV for the film annealed in nitrogen gas at 400°C. This indicates that the Cu2O is a potential candidate in solar cell applications.
退火温度和反应气体对Cu2O薄膜光学性能的影响
采用射频溅射技术制备Cu2O薄膜。在室温下沉积,然后在100°C和400°C之间进行热退火,并使用不同的气体,氧(O2)(氧化性和活性气体)和氮(N2)(惰性气体),除了空气,形成的薄膜进行了比较。薄膜的厚度保持恒定,约为2000 A(埃)。此外,射频功率和压力沉积也保持不变。在200 nm ~ 400 nm(紫外光谱)、400 nm ~ 700 nm(可见光光谱)、700 nm ~ 800 nm(红外光谱)的波长范围内对薄膜的透光率和光致发光进行了评价。从实验结果来看,较高的退火温度和氮气(N2)气体的引入产生了以下结果:Cu2O的光学带隙为2.23 eV,光致发光峰在551 nm和555 nm左右,与理论分析相符。总的来说,在400°C氮气中退火的Cu2O薄膜的光学带隙从室温下的2.56 eV减小到2.23 eV。这表明Cu2O是太阳能电池应用的潜在候选者。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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