Resolving deep sub-wavelength scattering of nanoscale sidewalls using parametric microscopy

Q1 Engineering
Nagendra Parasad Yadav , Ji-Chuan Xiong , Wei-Ping Liu , Wei-Ze Wang , Yun Cao , Ashish Kumar , Xue-Feng Liu
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引用次数: 2

Abstract

The quantitative optical measurement of deep sub-wavelength features with sub-nanometer sensitivity addresses the measurement challenge in the semiconductor fabrication process. Optical scatterings from the sidewalls of patterned devices reveal abundant structural and material information. We demonstrated a parametric indirect microscopic imaging (PIMI) technique that enables recovery of the profile of wavelength-scale objects with deep sub-wavelength resolution, based on measuring and filtering the variations of far-field scattering intensities when the illumination was modulated. The finite-difference time-domain (FDTD) numerical simulation was performed, and the experimental results were compared with atomic force microscopic (AFM) images to verify the resolution improvement achieved with PIMI. This work may provide a new approach to exploring the detailed structure and material properties of sidewalls and edges in semiconductor-patterned devices with enhanced contrast and resolution, compared with using the conventional optical microscopy, while retaining its advantage of a wide field of view and relatively low cost.

利用参数化显微镜解析纳米级侧壁的深亚波长散射
具有亚纳米灵敏度的深亚波长特征的定量光学测量解决了半导体制造过程中的测量难题。图案器件侧壁的光学散射揭示了丰富的结构和材料信息。我们展示了一种参数间接显微成像(PIMI)技术,该技术能够在测量和过滤照明被调制时远场散射强度的变化的基础上,以深亚波长分辨率恢复波长尺度物体的轮廓。进行了时域有限差分(FDTD)数值模拟,并将实验结果与原子力显微镜(AFM)图像进行了比较,验证了PIMI对分辨率的提高。这项工作可能提供一种新的方法来探索半导体图案器件的侧壁和边缘的详细结构和材料特性,与使用传统光学显微镜相比,具有增强的对比度和分辨率,同时保留其宽视场和相对低成本的优势。
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来源期刊
Journal of Electronic Science and Technology
Journal of Electronic Science and Technology Engineering-Electrical and Electronic Engineering
CiteScore
4.30
自引率
0.00%
发文量
1362
审稿时长
99 days
期刊介绍: JEST (International) covers the state-of-the-art achievements in electronic science and technology, including the most highlight areas: ¨ Communication Technology ¨ Computer Science and Information Technology ¨ Information and Network Security ¨ Bioelectronics and Biomedicine ¨ Neural Networks and Intelligent Systems ¨ Electronic Systems and Array Processing ¨ Optoelectronic and Photonic Technologies ¨ Electronic Materials and Devices ¨ Sensing and Measurement ¨ Signal Processing and Image Processing JEST (International) is dedicated to building an open, high-level academic journal supported by researchers, professionals, and academicians. The Journal has been fully indexed by Ei INSPEC and has published, with great honor, the contributions from more than 20 countries and regions in the world.
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