Practical Guide to the Design, Fabrication, and Calibration of NIST Nanocalorimeters.

IF 1.3 4区工程技术 Q3 INSTRUMENTS & INSTRUMENTATION

Journal of Research of the National Institute of Standards and Technology Pub Date : 2019-12-16 eCollection Date: 2019-01-01 DOI:10.6028/jres.124.021

Feng Yi, Michael D Grapes, David A LaVan

引用次数: 6

Abstract

We report here on the design, fabrication, and calibration of nanocalorimeter sensors used in the National Institute of Standards and Technology (NIST) Nanocalorimetry Measurements Project. These small-scale thermal analysis instruments are produced using silicon microfabrication approaches. A single platinum line serves as both the heater and temperature sensor, and it is made from a 500 μm wide, 100 nm thick platinum trace, suspended on a 100 nm thick silicon nitride membrane for thermal isolation. Supplemental materials to this article (available online) include drawing files and LabVIEW code used in the fabrication and calibration process.

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实用指南的设计，制造，和校准的NIST纳米热计。

我们在这里报告在美国国家标准与技术研究所(NIST)纳米热测量项目中使用的纳米热计传感器的设计、制造和校准。这些小型热分析仪器是使用硅微加工方法生产的。单个铂线同时用作加热器和温度传感器，它由500 μm宽，100 nm厚的铂线制成，悬浮在100 nm厚的氮化硅膜上进行热隔离。本文的补充材料(可在线获得)包括在制造和校准过程中使用的绘图文件和LabVIEW代码。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Research of the National Institute of Standards and Technology 工程技术-物理：应用

自引率

33.30%

发文量

审稿时长

>12 weeks

期刊介绍： The Journal of Research of the National Institute of Standards and Technology is the flagship publication of the National Institute of Standards and Technology. It has been published under various titles and forms since 1904, with its roots as Scientific Papers issued as the Bulletin of the Bureau of Standards. In 1928, the Scientific Papers were combined with Technologic Papers, which reported results of investigations of material and methods of testing. This new publication was titled the Bureau of Standards Journal of Research. The Journal of Research of NIST reports NIST research and development in metrology and related fields of physical science, engineering, applied mathematics, statistics, biotechnology, information technology.