FIB/SEM and SEM/EDS microstructural analysis of metal-ceramic and zirconia-ceramic interfaces.

F Massimi, G Merlati, M Sebastiani, P Battaini, P Menghini, E Bemporad
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Abstract

Recently introduced FIB/SEM analysis in microscopy seems to provide a high-resolution characterization of the samples by 3D (FIB) cross-sectioning and (SEM) high resolution imaging. The aim of this study was to apply the FIB/SEM and SEM/EDS analysis to the interfaces of a metal-ceramic vs. two zirconia-ceramic systems. Plate samples of three different prosthetic systems were prepared in the dental lab following the manufacturers' instructions, where metal-ceramic was the result of a ceramic veneering (porcelain-fused-to-metal) and the two zirconia-ceramic systems were produced by the dedicated CAD-CAM procedures of the zirconia cores (both with final sintering) and then veneered by layered or heat pressed ceramics. In a FIB/SEM equipment (also called DualBeam), a thin layer of platinum (1 μm) was deposited on samples surface crossing the interfaces, in order to protect them during milling. Then, increasingly deeper trenches were milled by a focused ion beam, first using a relatively higher and later using a lower ion current (from 9 nA to 0.28 nA, 30KV). Finally, FEG-SEM (5KV) micrographs (1000-50,000X) were acquired. In a SEM the analysis of the morphology and internal microstructure was performed by 13KV secondary and backscattered electrons signals (in all the samples). The compositional maps were then performed by EDS probe only in the metal-ceramic system (20kV). Despite the presence of many voids in all the ceramic layers, it was possible to identify: (1) the grain structures of the metallic and zirconia substrates, (2) the thin oxide layer at the metal-ceramic interface and its interactions with the first ceramic layer (wash technique), (3) the roughness of the two different zirconia cores and their interactions with the ceramic interface, where the presence of zirconia grains in the ceramic layer was reported in two system possibly due to sandblasting before ceramic firing.

金属-陶瓷和氧化锆-陶瓷界面的FIB/SEM和SEM/EDS微观结构分析。
最近在显微镜中引入的FIB/SEM分析似乎通过3D (FIB)横截面和(SEM)高分辨率成像提供了样品的高分辨率表征。本研究的目的是应用FIB/SEM和SEM/EDS分析金属陶瓷和两个氧化锆陶瓷系统的界面。根据制造商的说明,在牙科实验室中制备了三种不同假肢系统的板样,其中金属陶瓷是陶瓷贴面(瓷熔合到金属)的结果,两种氧化锆陶瓷系统是通过氧化锆核心的专用CAD-CAM程序生产的(都是最终烧结),然后通过分层或热压陶瓷贴面。在FIB/SEM设备(也称为DualBeam)中,在样品表面沉积了一层薄的铂(1 μm),穿过界面,以保护样品在铣削过程中。然后,通过聚焦离子束磨出越来越深的沟槽,首先使用相对较高的离子电流,然后使用较低的离子电流(从9 nA到0.28 nA, 30KV)。最后,获得FEG-SEM (5KV)显微图(1000- 50000 x)。在扫描电镜中,用13KV二次和背散射电子信号(在所有样品中)对形貌和内部微观结构进行了分析。然后仅在金属-陶瓷体系(20kV)中使用EDS探针进行成分图的绘制。尽管在所有陶瓷层中都存在许多空洞,但可以确定:(1)金属和氧化锆衬底的晶粒结构;(2)金属-陶瓷界面上的薄氧化层及其与第一陶瓷层的相互作用(清洗技术);(3)两种不同氧化锆芯的粗糙度及其与陶瓷界面的相互作用,其中两种体系中陶瓷层中存在氧化锆颗粒,可能是由于陶瓷烧制前喷砂所致。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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