{"title":"Surface science, MEMS and NEMS: Progress and opportunities for surface science research performed on, or by, microdevices","authors":"D. Berman , J. Krim","doi":"10.1016/j.progsurf.2013.03.001","DOIUrl":null,"url":null,"abstract":"<div><p>Micro- and Nano-Electro-Mechanical Systems (MEMS and NEMS) represent existing (MEMS) and emerging (NEMS) technologies based on microfabrication of micron to nanometer scale miniature mechanical components (gears, latches, mirrors, etc.) that are integrated with electrical elements to allow for electro-mechanical actuation and/or capacitive displacement detection. One common aspect of MEMS and NEMS devices is that they have mechanical functionality that may include moveable parts whose motion is controlled by external electrical connections. Current fabrication methods, along with high surface to volume ratios, make MEMS and NEMS devices highly susceptible to surface forces and adsorbed surface species, to the point where the devices are now being increasingly utilized as sensitive probes in fundamental surface science studies. This sensitivity can potentially be used to great advantage if the devices can be made to operate reproducibly in well controlled environments. This review highlights a number of such recent studies, beginning with an overview of the fabrication processes employed for silicon, metal, diamond, graphene and carbon nanotube – based device technologies. A discussion of how traditional surface science studies on passive two-dimensional substrates compare to and contrast with studies performed on, or by, MEMS and/or NEMS devices, is also included. The overall goal is to highlight areas of current opportunity for surface scientists in the flourishing arena of micro- and nano-device fabrication and technology.</p></div>","PeriodicalId":416,"journal":{"name":"Progress in Surface Science","volume":null,"pages":null},"PeriodicalIF":8.7000,"publicationDate":"2013-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/j.progsurf.2013.03.001","citationCount":"99","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Progress in Surface Science","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0079681613000178","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"CHEMISTRY, PHYSICAL","Score":null,"Total":0}
引用次数: 99
Abstract
Micro- and Nano-Electro-Mechanical Systems (MEMS and NEMS) represent existing (MEMS) and emerging (NEMS) technologies based on microfabrication of micron to nanometer scale miniature mechanical components (gears, latches, mirrors, etc.) that are integrated with electrical elements to allow for electro-mechanical actuation and/or capacitive displacement detection. One common aspect of MEMS and NEMS devices is that they have mechanical functionality that may include moveable parts whose motion is controlled by external electrical connections. Current fabrication methods, along with high surface to volume ratios, make MEMS and NEMS devices highly susceptible to surface forces and adsorbed surface species, to the point where the devices are now being increasingly utilized as sensitive probes in fundamental surface science studies. This sensitivity can potentially be used to great advantage if the devices can be made to operate reproducibly in well controlled environments. This review highlights a number of such recent studies, beginning with an overview of the fabrication processes employed for silicon, metal, diamond, graphene and carbon nanotube – based device technologies. A discussion of how traditional surface science studies on passive two-dimensional substrates compare to and contrast with studies performed on, or by, MEMS and/or NEMS devices, is also included. The overall goal is to highlight areas of current opportunity for surface scientists in the flourishing arena of micro- and nano-device fabrication and technology.
期刊介绍:
Progress in Surface Science publishes progress reports and review articles by invited authors of international stature. The papers are aimed at surface scientists and cover various aspects of surface science. Papers in the new section Progress Highlights, are more concise and general at the same time, and are aimed at all scientists. Because of the transdisciplinary nature of surface science, topics are chosen for their timeliness from across the wide spectrum of scientific and engineering subjects. The journal strives to promote the exchange of ideas between surface scientists in the various areas. Authors are encouraged to write articles that are of relevance and interest to both established surface scientists and newcomers in the field.