Bing-Jie Wang, Xing-He Li, Xue-Yuan Li, Qing-Lan Wang, Qi Liu
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引用次数: 0
Abstract
Parallelism measurement of optical axes is essential for many optical systems. Conventional collimators are limited by their aperture size and suffer from reduced accuracy when nearly parallel optical axes produce overlapping focal-plane spots. In this paper, we present a convenient method for measuring optical-axis parallelism using a quadriwave lateral shearing interferometer (QWLSI), without being fundamentally limited by its aperture. Two 1064 nm beams are used to validate the method, and their direction angles are measured simultaneously. Experimental results show a measurement resolution of 1.08 '' and an angle measurement accuracy of1.63 '' .
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