Surface Morphology of Implanted Silicon Formed by Pulsed Light Heating

IF 0.48 Q4 Physics and Astronomy

Bulletin of the Russian Academy of Sciences: Physics Pub Date : 2026-09-14 DOI:10.1134/S106287382670139X

B. F. Farrakhov

引用次数: 0

Abstract

Various forms of textured surface on Si wafers were obtained by ion implantation followed by pulsed light heating. The effects of certain modes of ion implantation with B⁺, He⁺, He⁺⁺ ions and pulsed light heating on the mechanism of formation of recrystallized relief periodic microstructures from the molten phase on the surface of Si wafers were determined.

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脉冲光加热注入硅的表面形貌

通过离子注入和脉冲光加热，在硅晶片上获得了各种形式的织构表面。研究了B+、He+、He+离子注入模式和脉冲光加热对硅晶片表面熔融相再结晶起伏周期组织形成机理的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Bulletin of the Russian Academy of Sciences: Physics Physics and Astronomy-Physics and Astronomy (all)

CiteScore

0.90

自引率

0.00%

发文量

251

期刊介绍： Bulletin of the Russian Academy of Sciences: Physics is an international peer reviewed journal published with the participation of the Russian Academy of Sciences. It presents full-text articles (regular, letters to the editor, reviews) with the most recent results in miscellaneous fields of physics and astronomy: nuclear physics, cosmic rays, condensed matter physics, plasma physics, optics and photonics, nanotechnologies, solar and astrophysics, physical applications in material sciences, life sciences, etc. Bulletin of the Russian Academy of Sciences: Physics focuses on the most relevant multidisciplinary topics in natural sciences, both fundamental and applied. Manuscripts can be submitted in Russian and English languages and are subject to peer review. Accepted articles are usually combined in thematic issues on certain topics according to the journal editorial policy. Authors featured in the journal represent renowned scientific laboratories and institutes from different countries, including large international collaborations. There are globally recognized researchers among the authors: Nobel laureates and recipients of other awards, and members of national academies of sciences and international scientific societies.