Synthesis of Tris(allylamino)ethylsilane, Tetrakis(allylamino)­silane, and Silicon Carbonitride Films Based Thereon by Gas-Phase Processes

Abstract

1-Ethyl-N,N′,N″-tri(prop-2-en-1-yl)silanetriamine and N,N′,N″,N‴-tetra(prop-2-en-1-yl)silane­tetramine have been synthesized for the first time, purified, and characterized by elemental analysis and IR and NMR (¹H, ¹³C, ²⁹Si) spectra. Their thermal stabilities and quantitative temperature dependences of saturated vapor pressure have been studied in the temperature ranges of 294–378 and 296–394 K by dynamic flow tensimetry, and thermodynamic parameters of their evaporation have been determined. 1-Ethyl-N,N′,N″-tri­(prop-2-en-1-yl)silanetriamine has been tested as a precursor to silicon carbonitride films via room-temperature plasma-enhanced chemical vapor deposition. The obtained samples are characterized by a transparency of up to 91%, a refractive index of 1.55–1.61, and a band gap of 2.8–3.4 eV. The effect of annealing on the optical properties of the films has been studied.